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Alexander Orchowski
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Aalen, DE
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last 30 patents
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Patent Grant
Apparatus and method for exposing a radiation sensitive layer by me...
Patent number
7,015,487
Issue date
Mar 21, 2006
Carl Zeiss SMT AG
Oliver Kienzle
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Apparatus and method for exposing a radiation sensitive layer by me...
Publication number
20020071996
Publication date
Jun 13, 2002
Oliver Kienzle
B82 - NANO-TECHNOLOGY