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Alexander Ostendorf
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Langenau, DE
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last 30 patents
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Patent Grant
Sealing device, component and lithography apparatus
Patent number
11,740,562
Issue date
Aug 29, 2023
Carl Zeiss SMT GmbH
Dieter Bader
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Patents Applications
last 30 patents
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Patent Application
PROJECTION EXPOSURE APPARATUS AND METHOD FOR DESIGNING A COMPONENT...
Publication number
20240085800
Publication date
Mar 14, 2024
Carl Zeiss SMT GMBH
Thilo Pollak
G02 - OPTICS
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Patent Application
METHOD AND SWAPPING TOOL
Publication number
20230400772
Publication date
Dec 14, 2023
Carl Zeiss SMT GMBH
Eugen Doetzel
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
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Patent Application
SEALING DEVICE, COMPONENT AND LITHOGRAPHY APPARATUS
Publication number
20220019150
Publication date
Jan 20, 2022
Carl Zeiss SMT GMBH
Dieter Bader
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...