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Alexander Petrus Josephus VAN LANKVELT
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Veghel, NL
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Patents Grants
last 30 patents
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Patent Grant
Vibration isolation device, lithographic apparatus and method to tu...
Patent number
10,782,620
Issue date
Sep 22, 2020
ASML Netherlands B.V.
Alexander Petrus Josephus Van Lankvelt
F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information
Patent Grant
Vibration isolation system and lithographic apparatus
Patent number
10,545,414
Issue date
Jan 28, 2020
ASML Netherlands B.V.
Alexander Petrus Josephus Van Lankvelt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
VIBRATION ISOLATOR FOR SUPPORTING A PAYLOAD
Publication number
20230279919
Publication date
Sep 7, 2023
Carl Zeiss SMT GMBH
Alexander Petrus Josephus VAN LANKVELT
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
VIBRATION ISOLATOR FOR SUPPORTING A PAYLOAD
Publication number
20230085971
Publication date
Mar 23, 2023
Carl Zeiss SMT GMBH
Galip Tuna TURKBEY
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
VIBRATION ISOLATION DEVICE, LITHOGRAPHIC APPARATUS AND METHOD TO T...
Publication number
20180328434
Publication date
Nov 15, 2018
ASML NETHERLANDS B.V.
Alexander Petrus Josephus VAN LANKVELT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
VIBRATION ISOLATION SYSTEM AND LITHOGRAPHIC APPARATUS
Publication number
20180299783
Publication date
Oct 18, 2018
ASML NETHERLANDS B.V.
Alexander Petrus Josephus VAN LANKVELT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY