Alexander R. Shimkunas

Person

Palo Alto, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for making high resolution silicon shadow masks
- Patent number 4,919,749
- Issue date Apr 24, 1990
- Nanostructures, Inc.
- Philip E. Mauger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process for manufacturing a mask for use in X-ray photolithography...
- Patent number 4,708,919
- Issue date Nov 24, 1987
- Micronix Corporation
- Alexander R. Shimkunas
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Additive process for manufacturing a mask for use in X-ray photolit...
- Patent number 4,696,878
- Issue date Sep 29, 1987
- Micronix Corporation
- Alexander R. Shimkunas
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for producing a mask for use in X-ray photolithography and r...
- Patent number 4,680,243
- Issue date Jul 14, 1987
- Micronix Corporation
- Alexander R. Shimkunas
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask using polyimide to support a patterned x-ray opaque layer
- Patent number 4,671,850
- Issue date Jun 9, 1987
- Micronix Corporation
- Alexander R. Shimkunas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for making a mask used in x-ray photolithography
- Patent number 4,668,336
- Issue date May 26, 1987
- Micronix Corporation
- Alexander R. Shimkunas
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process for making a mask used in x-ray photolithography
- Patent number 4,608,268
- Issue date Aug 26, 1986
- Micronix Corporation
- Alexander R. Shimkunas
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Alexander R. Shimkunas

Person

Patents Grantslast 30 patents

Method for making high resolution silicon shadow masks

Process for manufacturing a mask for use in X-ray photolithography...

Additive process for manufacturing a mask for use in X-ray photolit...

Method for producing a mask for use in X-ray photolithography and r...

Mask using polyimide to support a patterned x-ray opaque layer

Process for making a mask used in x-ray photolithography

Process for making a mask used in x-ray photolithography