Alexander S. Polyak

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
In-situ wafer rotation for carousel processing chambers
- Patent number 11,798,825
- Issue date Oct 24, 2023
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal support design for precise chamber matching and process co...
- Patent number 11,501,957
- Issue date Nov 15, 2022
- Applied Materials, Inc.
- Gopu Krishna
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device to increase deposition uniformity in spatial ALD processing...
- Patent number 11,085,129
- Issue date Aug 10, 2021
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature heater for processing chamber
- Patent number 10,959,294
- Issue date Mar 23, 2021
- Applied Materials, Inc.
- Alexander S. Polyak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for prevention of backside deposition in a spatial ALD pr...
- Patent number 10,658,223
- Issue date May 19, 2020
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device to increase deposition uniformity in spatial ALD processing...
- Patent number 10,494,736
- Issue date Dec 3, 2019
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Non-metallic thermal CVD/ALD Gas Injector and Purge Systems
- Patent number 10,415,137
- Issue date Sep 17, 2019
- Applied Materials, Inc.
- Alexander S. Polyak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Load lock chamber designs for high-throughput processing system
- Patent number 9,022,715
- Issue date May 5, 2015
- Applied Materials, Inc.
- Alexander S. Polyak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature actuated tensioning mechanism
- Patent number 8,899,408
- Issue date Dec 2, 2014
- Applied Materials, Inc.
- Alexander S. Polyak
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Scrubber box and methods for using the same
- Patent number 7,774,887
- Issue date Aug 17, 2010
- Applied Materials, Inc.
- Joseph Yudovsky
- B08 - CLEANING
Information Patent Grant
Pad conditioning head for CMP process
- Patent number 7,459,056
- Issue date Dec 2, 2008
- Applied Materials, Inc.
- Alexander S Polyak
- B24 - GRINDING POLISHING
Information Patent Grant
Scrubber box
- Patent number 7,377,002
- Issue date May 27, 2008
- Applied Materials, Inc.
- Joseph Yudovsky
- B08 - CLEANING
Information Patent Grant
Pad conditioning head for CMP process
- Patent number 7,288,165
- Issue date Oct 30, 2007
- Applied Materials, Inc.
- Alexander S Polyak
- B24 - GRINDING POLISHING
Information Patent Grant
Slurry delivery arm
- Patent number 6,939,210
- Issue date Sep 6, 2005
- Applied Materials, Inc.
- Alexander S. Polyak
- B24 - GRINDING POLISHING
Information Patent Grant
Compact microwave downstream plasma system
- Patent number 6,080,270
- Issue date Jun 27, 2000
- Lam Research Corporation
- M. Shams Tabrez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mechanism for feedthrough of rotary motion to a sealed chamber
- Patent number 5,243,867
- Issue date Sep 14, 1993
- Huntington Mechanical Laboratories, Inc.
- Alexander Polyak
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Linear ball bearing assembly
- Patent number 5,207,510
- Issue date May 4, 1993
- Alexander Polyak
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Device for positioning objects within a sealed chamber
- Patent number 5,139,383
- Issue date Aug 18, 1992
- Huntington Mechanical Laboratories, Inc.
- Alexander Polyak
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Pedestal Support Design for Precise Chamber Matching and Process Co...
- Publication number 20220068608
- Publication date Mar 3, 2022
- Applied Materials, Inc.
- Gopu Krishna
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device To Increase Deposition Uniformity In Spatial ALD Processing...
- Publication number 20200087816
- Publication date Mar 19, 2020
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
In-Situ Wafer Rotation for Carousel Processing Chambers
- Publication number 20190333783
- Publication date Oct 31, 2019
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Integrated Atomic Layer Deposition Tool
- Publication number 20180155834
- Publication date Jun 7, 2018
- Applied Materials, Inc.
- Mukund Srinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Device To Increase Deposition Uniformity In Spatial ALD Processing...
- Publication number 20180002830
- Publication date Jan 4, 2018
- Applied Materials, Inc.
- Joseph Yudovsky
- C30 - CRYSTAL GROWTH
Information Patent Application
Apparatus For Prevention Of Backside Deposition In A Spatial ALD Pr...
- Publication number 20170309512
- Publication date Oct 26, 2017
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High Temperature Heater For Processing Chamber
- Publication number 20170196047
- Publication date Jul 6, 2017
- Applied Materials, Inc.
- Alexander S. Polyak
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Non-Metallic Thermal CVD/ALD Gas Injector And Purge System
- Publication number 20170191159
- Publication date Jul 6, 2017
- Applied Materials, Inc.
- Alexander S. Polyak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOAD LOCK CHAMBER DESIGNS FOR HIGH-THROUGHPUT PROCESSING SYSTEM
- Publication number 20140079514
- Publication date Mar 20, 2014
- Alexander S. POLYAK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE ACTUATED TENSIONING MECHANISM
- Publication number 20140034454
- Publication date Feb 6, 2014
- Applied Materials, Inc.
- Alexander S. POLYAK
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
STATIC DEPOSITION PROFILE MODULATION FOR LINEAR PLASMA SOURCE
- Publication number 20130273262
- Publication date Oct 17, 2013
- Applied Materials, Inc.
- Manoj Vellaikal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADVANCED PLATFORM FOR PASSIVATING CRYSTALLINE SILICON SOLAR CELLS
- Publication number 20130171757
- Publication date Jul 4, 2013
- HARI K. PONNEKANTI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR BALANCING GAS FLOW SUPPLYING MULTIPLE CVD REACTORS
- Publication number 20130104996
- Publication date May 2, 2013
- Applied Materials, Inc.
- JEONGHOON OH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR GAS DISTRIBUTION AND PLASMA APPLICATION IN...
- Publication number 20130059092
- Publication date Mar 7, 2013
- Applied Materials, Inc.
- HEMANT P. MUNGEKAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING CHAMBER WITH TRANSLATING WEAR PLATE FOR LIFT PIN
- Publication number 20110164955
- Publication date Jul 7, 2011
- APPLIED MATERIALS,INC.
- John M. White
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOUND LIFT PIN TIP WITH TEMPERATURE COMPENSATED ATTACHMENT FEATURE
- Publication number 20110033620
- Publication date Feb 10, 2011
- Applied Materials, Inc.
- Alexander S. Polyak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RECIRCULATING LINEAR ROLLING BUSHING
- Publication number 20110014396
- Publication date Jan 20, 2011
- Applied Materials, Inc.
- Alexander S. Polyak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONCRETE VACUUM CHAMBER
- Publication number 20100021273
- Publication date Jan 28, 2010
- Applied Materials, Inc.
- ALEXANDER S. POLYAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH EQUIPMENT ROBOTS AND METHODS OF ARRAY TO ARRAY WORK-PIECE TRA...
- Publication number 20080292433
- Publication date Nov 27, 2008
- Robert Z. Bachrach
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH EQUIPMENT ROBOTS AND METHODS OF STACK TO ARRAY WORK-PIECE TRA...
- Publication number 20080279672
- Publication date Nov 13, 2008
- Robert Z. Bachrach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BATCH EQUIPMENT ROBOTS AND METHODS WITHIN EQUIPMENT WORK-PIECE TRAN...
- Publication number 20080279658
- Publication date Nov 13, 2008
- Robert Z. Bachrach
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SCRUBBER BOX AND METHODS FOR USING THE SAME
- Publication number 20080210258
- Publication date Sep 4, 2008
- APPLIED MATERIALS, INC.
- Joseph Yudovsky
- B08 - CLEANING
Information Patent Application
PAD CONDITIONING HEAD FOR CMP PROCESS
- Publication number 20080057836
- Publication date Mar 6, 2008
- APPLIED MATERIALS, INC.
- Alexander S. Polyak
- B24 - GRINDING POLISHING
Information Patent Application
METHOD FOR PROCESSING A SUBSTRATE USING MULTIPLE FLUID DISTRIBTUION...
- Publication number 20080038998
- Publication date Feb 14, 2008
- Alexander S. Polyak
- B24 - GRINDING POLISHING
Information Patent Application
Method for processing a substrate using multiple fluid distribution...
- Publication number 20060079156
- Publication date Apr 13, 2006
- APPLIED MATERIALS, INC.
- Alexander S. Polyak
- B24 - GRINDING POLISHING
Information Patent Application
Slurry delivery arm
- Publication number 20050272352
- Publication date Dec 8, 2005
- APPLIED MATERIALS, INC.
- Alexander S. Polyak
- B24 - GRINDING POLISHING
Information Patent Application
Pad conditioning head for CMP process
- Publication number 20050167048
- Publication date Aug 4, 2005
- APPLIED MATERIALS, INC.
- Alexander S. Polyak
- B24 - GRINDING POLISHING
Information Patent Application
Scrubber box and methods for using the same
- Publication number 20050087212
- Publication date Apr 28, 2005
- Joseph Yudovsky
- B08 - CLEANING
Information Patent Application
Slurry delivery arm
- Publication number 20040229549
- Publication date Nov 18, 2004
- APPLIED MATERIALS, INC.
- Alexander S. Polyak
- B24 - GRINDING POLISHING

Alexander S. Polyak

Person

Patents Grantslast 30 patents

In-situ wafer rotation for carousel processing chambers

Pedestal support design for precise chamber matching and process co...

Device to increase deposition uniformity in spatial ALD processing...

High temperature heater for processing chamber

Apparatus for prevention of backside deposition in a spatial ALD pr...

Device to increase deposition uniformity in spatial ALD processing...

Non-metallic thermal CVD/ALD Gas Injector and Purge Systems

Load lock chamber designs for high-throughput processing system

Temperature actuated tensioning mechanism

Scrubber box and methods for using the same

Pad conditioning head for CMP process

Scrubber box

Pad conditioning head for CMP process

Slurry delivery arm

Compact microwave downstream plasma system

Mechanism for feedthrough of rotary motion to a sealed chamber

Linear ball bearing assembly

Device for positioning objects within a sealed chamber

Patents Applicationslast 30 patents

Pedestal Support Design for Precise Chamber Matching and Process Co...

Device To Increase Deposition Uniformity In Spatial ALD Processing...

In-Situ Wafer Rotation for Carousel Processing Chambers

Integrated Atomic Layer Deposition Tool

Device To Increase Deposition Uniformity In Spatial ALD Processing...

Apparatus For Prevention Of Backside Deposition In A Spatial ALD Pr...

High Temperature Heater For Processing Chamber

Non-Metallic Thermal CVD/ALD Gas Injector And Purge System

LOAD LOCK CHAMBER DESIGNS FOR HIGH-THROUGHPUT PROCESSING SYSTEM

TEMPERATURE ACTUATED TENSIONING MECHANISM

STATIC DEPOSITION PROFILE MODULATION FOR LINEAR PLASMA SOURCE

ADVANCED PLATFORM FOR PASSIVATING CRYSTALLINE SILICON SOLAR CELLS

METHOD FOR BALANCING GAS FLOW SUPPLYING MULTIPLE CVD REACTORS

METHOD AND APPARATUS FOR GAS DISTRIBUTION AND PLASMA APPLICATION IN...

PROCESSING CHAMBER WITH TRANSLATING WEAR PLATE FOR LIFT PIN

COMPOUND LIFT PIN TIP WITH TEMPERATURE COMPENSATED ATTACHMENT FEATURE

RECIRCULATING LINEAR ROLLING BUSHING

CONCRETE VACUUM CHAMBER

BATCH EQUIPMENT ROBOTS AND METHODS OF ARRAY TO ARRAY WORK-PIECE TRA...

BATCH EQUIPMENT ROBOTS AND METHODS OF STACK TO ARRAY WORK-PIECE TRA...

BATCH EQUIPMENT ROBOTS AND METHODS WITHIN EQUIPMENT WORK-PIECE TRAN...

SCRUBBER BOX AND METHODS FOR USING THE SAME

PAD CONDITIONING HEAD FOR CMP PROCESS

METHOD FOR PROCESSING A SUBSTRATE USING MULTIPLE FLUID DISTRIBTUION...

Method for processing a substrate using multiple fluid distribution...

Slurry delivery arm

Pad conditioning head for CMP process

Scrubber box and methods for using the same

Slurry delivery arm