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Alexander Serebryakov
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Hertogenbosch, NL
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last 30 patents
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Patent Grant
Method for exposing a substrate and lithographic projection apparatus
Patent number
7,670,731
Issue date
Mar 2, 2010
ASML Netherlands B.V.
Jozef Maria Finders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
Method for exposing a substrate and lithographic projection apparatus
Publication number
20070099100
Publication date
May 3, 2007
ASML NETHERLANDS B.V.
Jozef Maria Finders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY