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Alexander Soskov
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Danvers, MA, US
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Patents Grants
last 30 patents
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Patent Grant
Hardware plasma interlock system
Patent number
9,060,411
Issue date
Jun 16, 2015
Varian Semiconductor Equipment Associates, Inc.
Costel Biloiu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
HARDWARE PLASMA INTERLOCK SYSTEM
Publication number
20140265849
Publication date
Sep 18, 2014
Varian Semiconductor Equipment Associates, Inc.
Costel Biloiu
H01 - BASIC ELECTRIC ELEMENTS