Alexander T. Sohwarm

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Austin, TX, US

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Patents Applicationslast 30 patents

Information Patent Application
Dynamic metrology schemes and sampling schemes for advanced process...
- Publication number 20080133163
- Publication date Jun 5, 2008
- Arulkumar P. Shanmugasundram
- G05 - CONTROLLING REGULATING
Information Patent Application
Dynamic metrology schemes and sampling schemes for advanced process...
- Publication number 20080109089
- Publication date May 8, 2008
- Arulkumar P. Shanmugasundram
- G05 - CONTROLLING REGULATING