Alexander Viacheslavovich SHCHERBAKOV

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Moscow region, RU

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Patents Grantslast 30 patents

Information Patent Grant
Laser speckle interferometric system and method for mobile devices
- Patent number 10,206,576
- Issue date Feb 19, 2019
- Samsung Electronics Co., Ltd.
- Alexander Viacheslavovich Shcherbakov
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Method and device for measuring critical dimension of nanostructure
- Patent number 9,400,254
- Issue date Jul 26, 2016
- Samsung Electronics Co., Ltd.
- Alexander Viacheslavovich Shcherbakov
- G01 - MEASURING TESTING
Information Patent Grant
Optical measuring system and method of measuring critical size
- Patent number 9,322,640
- Issue date Apr 26, 2016
- SAMSING ELECTRONICS CO., LTD.
- Sergey Nikolaevich Koptyaev
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
LASER SPECKLE INTERFEROMETRIC SYSTEM AND METHOD FOR MOBILE DEVICES
- Publication number 20160066790
- Publication date Mar 10, 2016
- Samsung Electronics Co., Ltd.
- Alexander Viacheslavovich SHCHERBAKOV
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE FOR MEASURING CRITICAL DIMENSION OF NANOSTRUCTURE
- Publication number 20150276378
- Publication date Oct 1, 2015
- Samsung Electronics Co., Ltd.
- Alexander Viacheslavovich SHCHERBAKOV
- B82 - NANO-TECHNOLOGY