Alexander Vyacheslavovich HCHERBAKOV

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Moscow Oblast, RU

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Patents Applicationslast 30 patents

Information Patent Application
OPTICAL MEASURING SYSTEM AND METHOD OF MEASURING CRITICAL SIZE
- Publication number 20140043471
- Publication date Feb 13, 2014
- Samsung Electronics Co., Ltd.
- Sergey Nikolaevich KOPTYAEV
- G01 - MEASURING TESTING