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Alexander Winkler
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Aalen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Diffractive optical element for a test interferometer
Patent number
12,235,097
Issue date
Feb 25, 2025
Carl Zeiss SMT GmbH
Alexander Winkler
G01 - MEASURING TESTING
Information
Patent Grant
Method for adjusting a lighting setting
Patent number
10,514,606
Issue date
Dec 24, 2019
Carl Zeiss SMT GmbH
Alexander Winkler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination optics for EUV projection lithography
Patent number
9,939,731
Issue date
Apr 10, 2018
Carl Zeiss SMT GmbH
Alexander Winkler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR MEASURING THE ILLUMINATION PUPIL IN A SCANNER TAKING INT...
Publication number
20250044705
Publication date
Feb 6, 2025
Carl Zeiss SMT GMBH
Robert BUSCHLINGER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR SIMULATING ILLUMINATION AND IMAGING PROPERTIES OF AN OPT...
Publication number
20240402613
Publication date
Dec 5, 2024
Carl Zeiss SMT GMBH
Alexander Winkler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR OPTIMIZING A PUPIL STOP SHAPE FOR SIMULATING ILLUMINATIO...
Publication number
20240319613
Publication date
Sep 26, 2024
Carl Zeiss SMT GMBH
Alexander Winkler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DIFFRACTIVE OPTICAL ELEMENT FOR A TEST INTERFEROMETER
Publication number
20220170735
Publication date
Jun 2, 2022
Carl Zeiss SMT GMBH
Alexander Winkler
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR ADJUSTING A LIGHTING SETTING
Publication number
20190146353
Publication date
May 16, 2019
Carl Zeiss SMT GMBH
Alexander Winkler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION OPTICS FOR EUV PROJECTION LITHOGRAPHY
Publication number
20170336719
Publication date
Nov 23, 2017
Alexander Winkler
G02 - OPTICS