Alexander Wolf

Person

Oberkochen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method and device for characterizing the surface shape of an optica...
- Patent number 11,927,500
- Issue date Mar 12, 2024
- Carl Zeiss SMT GmbH
- Steffen Siegler
- G01 - MEASURING TESTING
Information Patent Grant
Interferometric measurement method and interferometric measurement...
- Patent number 11,879,721
- Issue date Jan 23, 2024
- Carl Zeiss SMT GmbH
- Alexander Wolf
- G01 - MEASURING TESTING
Information Patent Grant
Projection exposure method and projection exposure apparatus for mi...
- Patent number 11,181,826
- Issue date Nov 23, 2021
- Carl Zeiss SMT GmbH
- Alexander Wolf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging optical unit for imaging an object field into an image field
- Patent number 11,119,413
- Issue date Sep 14, 2021
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical module with an anticollision device for module components
- Patent number 11,054,755
- Issue date Jul 6, 2021
- Carl Zeiss SMT GmbH
- Joachim Hartjes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure method and projection exposure apparatus for mi...
- Patent number 10,761,429
- Issue date Sep 1, 2020
- Carl Zeiss SMT GmbH
- Alexander Wolf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging optical unit for imaging an object field into an image fiel...
- Patent number 10,330,903
- Issue date Jun 25, 2019
- Carl Zeiss SMT GmbH
- Alexander Wolf
- G02 - OPTICS
Information Patent Grant
Optical component for use in a radiation source module of a project...
- Patent number 10,288,894
- Issue date May 14, 2019
- Carl Zeiss SMT GmbH
- Michael Patra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus with a highly flexible manipulator
- Patent number 10,261,425
- Issue date Apr 16, 2019
- Carl Zeiss SMT GmbH
- Alexander Wolf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus including mechanism to reduce influen...
- Patent number 10,162,267
- Issue date Dec 25, 2018
- Carl Zeiss SMT GmbH
- Toralf Gruner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus for microlithography comprising an op...
- Patent number 9,759,550
- Issue date Sep 12, 2017
- Carl Zeiss SMT GmbH
- Alexander Wolf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microlithographic apparatus and method of varying a light irradianc...
- Patent number 9,720,336
- Issue date Aug 1, 2017
- Carl Zeiss SMT GmbH
- Holger Walter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus for microlithography comprising an op...
- Patent number 9,714,822
- Issue date Jul 25, 2017
- Carl Zeiss SMT GmbH
- Alexander Wolf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging optical unit
- Patent number 9,377,608
- Issue date Jun 28, 2016
- Carl Zeiss SMT GmbH
- Alexander Wolf
- G02 - OPTICS
Information Patent Grant
Projection objective with diaphragms
- Patent number 8,488,104
- Issue date Jul 16, 2013
- Carl Zeiss SMT GmbH
- Nils Dieckmann
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
FACET ASSEMBLY FOR A FACET MIRROR
- Publication number 20230026528
- Publication date Jan 26, 2023
- Carl Zeiss SMT GMBH
- Joachim Hartjes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTERFEROMETRIC MEASUREMENT METHOD AND INTERFEROMETRIC MEASUREMENT...
- Publication number 20220307822
- Publication date Sep 29, 2022
- Carl Zeiss SMT GMBH
- Alexander Wolf
- G01 - MEASURING TESTING
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY
- Publication number 20220299733
- Publication date Sep 22, 2022
- Carl Zeiss SMT GMBH
- Joachim Hartjes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND DEVICE FOR CHARACTERIZING THE SURFACE SHAPE OF AN OPTICA...
- Publication number 20220236139
- Publication date Jul 28, 2022
- Carl Zeiss SMT GMBH
- Steffen SIEGLER
- G01 - MEASURING TESTING
Information Patent Application
ASSEMBLY IN AN OPTICAL SYSTEM, IN PARTICULAR OF A MICROLITHOGRAPHIC...
- Publication number 20220214627
- Publication date Jul 7, 2022
- Carl Zeiss SMT GMBH
- Joachim Hartjes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE METHOD AND PROJECTION EXPOSURE APPARATUS FOR MI...
- Publication number 20200371444
- Publication date Nov 26, 2020
- Carl Zeiss SMT GMBH
- Alexander Wolf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGING OPTICAL UNIT FOR IMAGING AN OBJECT FIELD INTO AN IMAGE FIELD
- Publication number 20200218045
- Publication date Jul 9, 2020
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE METHOD AND PROJECTION EXPOSURE APPARATUS FOR MI...
- Publication number 20200089127
- Publication date Mar 19, 2020
- Carl Zeiss SMT GMBH
- Alexander Wolf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL MODULE WITH AN ANTICOLLISION DEVICE FOR MODULE COMPONENTS
- Publication number 20190171118
- Publication date Jun 6, 2019
- Carl Zeiss SMT GMBH
- Joachim Hartjes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION LENS WITH A MEASUREMENT BEAM PATH
- Publication number 20190107784
- Publication date Apr 11, 2019
- Carl Zeiss SMT GMBH
- Alexander WOLF
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGING OPTICAL UNIT FOR IMAGING AN OBJECT FIELD INTO AN IMAGE FIEL...
- Publication number 20180252904
- Publication date Sep 6, 2018
- Carl Zeiss SMT GMBH
- Alexander Wolf
- G02 - OPTICS
Information Patent Application
OPTICAL COMPONENT
- Publication number 20170293154
- Publication date Oct 12, 2017
- Carl Zeiss SMT GMBH
- Michael Patra
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE APPARATUS WITH A HIGHLY FLEXIBLE MANIPULATOR
- Publication number 20160054662
- Publication date Feb 25, 2016
- Carl Zeiss SMT GMBH
- Alexander Wolf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICROLITHOGRAPHIC APPARATUS AND METHOD OF VARYING A LIGHT IRRADIANC...
- Publication number 20160004174
- Publication date Jan 7, 2016
- Carl Zeiss SMT GMBH
- Holger Walter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS INCLUDING MECHANISM TO REDUCE INFLUEN...
- Publication number 20150316854
- Publication date Nov 5, 2015
- Carl Zeiss SMT GMBH
- Toralf Gruner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY COMPRISING AN OP...
- Publication number 20150198437
- Publication date Jul 16, 2015
- Carl Zeiss SMT GMBH
- Alexander Wolf
- G01 - MEASURING TESTING
Information Patent Application
IMAGING OPTICAL UNIT
- Publication number 20140071418
- Publication date Mar 13, 2014
- Alexander Wolf
- G02 - OPTICS
Information Patent Application
PROJECTION OBJECTIVE WITH DIAPHRAGMS
- Publication number 20110285979
- Publication date Nov 24, 2011
- Carl Zeiss SMT GMBH
- Nils Dieckmann
- G02 - OPTICS

Alexander Wolf

Person

Patents Grantslast 30 patents

Method and device for characterizing the surface shape of an optica...

Interferometric measurement method and interferometric measurement...

Projection exposure method and projection exposure apparatus for mi...

Imaging optical unit for imaging an object field into an image field

Optical module with an anticollision device for module components

Projection exposure method and projection exposure apparatus for mi...

Imaging optical unit for imaging an object field into an image fiel...

Optical component for use in a radiation source module of a project...

Projection exposure apparatus with a highly flexible manipulator

Projection exposure apparatus including mechanism to reduce influen...

Projection exposure apparatus for microlithography comprising an op...

Microlithographic apparatus and method of varying a light irradianc...

Projection exposure apparatus for microlithography comprising an op...

Imaging optical unit

Projection objective with diaphragms

Patents Applicationslast 30 patents

FACET ASSEMBLY FOR A FACET MIRROR

INTERFEROMETRIC MEASUREMENT METHOD AND INTERFEROMETRIC MEASUREMENT...

PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY

METHOD AND DEVICE FOR CHARACTERIZING THE SURFACE SHAPE OF AN OPTICA...

ASSEMBLY IN AN OPTICAL SYSTEM, IN PARTICULAR OF A MICROLITHOGRAPHIC...

PROJECTION EXPOSURE METHOD AND PROJECTION EXPOSURE APPARATUS FOR MI...

IMAGING OPTICAL UNIT FOR IMAGING AN OBJECT FIELD INTO AN IMAGE FIELD

PROJECTION EXPOSURE METHOD AND PROJECTION EXPOSURE APPARATUS FOR MI...

OPTICAL MODULE WITH AN ANTICOLLISION DEVICE FOR MODULE COMPONENTS

PROJECTION LENS WITH A MEASUREMENT BEAM PATH

IMAGING OPTICAL UNIT FOR IMAGING AN OBJECT FIELD INTO AN IMAGE FIEL...

OPTICAL COMPONENT

PROJECTION EXPOSURE APPARATUS WITH A HIGHLY FLEXIBLE MANIPULATOR

MICROLITHOGRAPHIC APPARATUS AND METHOD OF VARYING A LIGHT IRRADIANC...

PROJECTION EXPOSURE APPARATUS INCLUDING MECHANISM TO REDUCE INFLUEN...

PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY COMPRISING AN OP...

IMAGING OPTICAL UNIT

PROJECTION OBJECTIVE WITH DIAPHRAGMS