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Alexandr Cosceev
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Lonsee, DE
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last 30 patents
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Patent Grant
Preheat processes for millisecond anneal system
Patent number
12,027,427
Issue date
Jul 2, 2024
Mattson Technology, Inc.
Markus Lieberer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for hydrogen assisted atmospheric radical oxidation
Patent number
12,014,920
Issue date
Jun 18, 2024
Mattson Technology, Inc.
Michael X. Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hydrogen assisted atmospheric radical oxidation
Patent number
11,521,847
Issue date
Dec 6, 2022
Beijing E-Town Semiconductor Technology Co., Ltd.
Michael X. Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Features for improving process uniformity in a millisecond anneal s...
Patent number
10,770,309
Issue date
Sep 8, 2020
Mattson Technology, Inc.
Alexandr Cosceev
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Preheat processes for millisecond anneal system
Patent number
10,727,140
Issue date
Jul 28, 2020
Mattson Technology, Inc.
Markus Lieberer
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Preheat Processes for Millisecond Anneal System
Publication number
20240304502
Publication date
Sep 12, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Markus Lieberer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus for Hydrogen Assisted Atmospheric Radical Oxidation
Publication number
20230099054
Publication date
Mar 30, 2023
Mattson Technology, Inc.
Michael X. Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Features for Improving Process Uniformity in a Millisecond Anneal S...
Publication number
20200402811
Publication date
Dec 24, 2020
Mattson Technology, Inc.
Alexandr Cosceev
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Application
Hydrogen Assisted Atmospheric Radical Oxidation
Publication number
20200350158
Publication date
Nov 5, 2020
Mattson Technology, Inc.
Michael X. Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Preheat Processes for Millisecond Anneal System
Publication number
20200350217
Publication date
Nov 5, 2020
Mattson Technology, Inc.
Markus Lieberer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Features for Improving Process Uniformity in a Millisecond Anneal S...
Publication number
20170194163
Publication date
Jul 6, 2017
Mattson Technology, Inc.
Alexandr Cosceev
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Preheat Processes for Millisecond Anneal System
Publication number
20170194220
Publication date
Jul 6, 2017
Mattson Technology, Inc.
Markus Lieberer
H01 - BASIC ELECTRIC ELEMENTS