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Alexandra Ludsteck
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Munchen, DE
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Patents Grants
last 30 patents
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Patent Grant
Method of forming and/or modifying a dielectric film on a semicondu...
Patent number
7,101,812
Issue date
Sep 5, 2006
Mattson Technology, Inc.
Ignaz Eisele
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Method of forming and/or modifying a dielectric film on a semicondu...
Publication number
20040058557
Publication date
Mar 25, 2004
Mattson Technology, Inc.
Ignaz Eisele
H01 - BASIC ELECTRIC ELEMENTS