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Alexandre Kodentsov
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Eindhoven, NL
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last 30 patents
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Patent Grant
Spectral purity filter
Patent number
9,007,565
Issue date
Apr 14, 2015
ASML Netherlands B.V.
Andrei Mikhailovich Yakunin
G02 - OPTICS
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last 30 patents
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Patent Application
SPECTRAL PURITY FILTER
Publication number
20120307224
Publication date
Dec 6, 2012
ASML NETHERLANDS B.V.
Andrei Mikhailovich Yakunin
G02 - OPTICS