Alexei Marakhatnov

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Albany, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Dual plasma volume processing apparatus for neutral/ion flux control
- Patent number 9,184,028
- Issue date Nov 10, 2015
- Lam Research Corporation
- Rajinder Dhindsa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing chamber with dual axial gas injection and exhaust
- Patent number 8,869,742
- Issue date Oct 28, 2014
- Lam Research Corporation
- Rajinder Dhindsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Plasma Processing Chamber with Dual Axial Gas Injection and Exhaust
- Publication number 20150004793
- Publication date Jan 1, 2015
- LAM RESEARCH CORPORATION
- Rajinder Dhindsa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dual Plasma Volume Processing Apparatus for Neutral/Ion Flux Control
- Publication number 20120031559
- Publication date Feb 9, 2012
- LAM RESEARCH CORPORATION
- Rajinder Dhindsa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing Chamber with Dual Axial Gas Injection and Exhaust
- Publication number 20120034786
- Publication date Feb 9, 2012
- LAM RESEARCH CORPORATION
- Rajinder Dhindsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...