Alexei V. Smirnov

Person

Fort Collins, CO, US

People

Patents Grantslast 30 patents

Information Patent Grant
Mass flow controller utilizing nonlinearity component functions
- Patent number 11,435,764
- Issue date Sep 6, 2022
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Grant
Multi-chamber rate-of-change system for gas flow verification
- Patent number 11,327,510
- Issue date May 10, 2022
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Grant
Thermal mass flow sensor with improved accuracy
- Patent number 11,209,298
- Issue date Dec 28, 2021
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G01 - MEASURING TESTING
Information Patent Grant
Parasitic flow correction method and apparatus
- Patent number 11,073,845
- Issue date Jul 27, 2021
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G01 - MEASURING TESTING
Information Patent Grant
Multi-gas mass flow controller and method
- Patent number 11,041,749
- Issue date Jun 22, 2021
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Grant
High flow tubular bypass
- Patent number 10,982,985
- Issue date Apr 20, 2021
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G01 - MEASURING TESTING
Information Patent Grant
Mass flow controller and method for controlling a mass flow rate of...
- Patent number 10,533,982
- Issue date Jan 14, 2020
- Hitachi Metals, Ltd.
- Patrick Albright
- G01 - MEASURING TESTING
Information Patent Grant
Gas insensitive mass flow control systems and methods
- Patent number 10,534,375
- Issue date Jan 14, 2020
- Hitachi Metals, Ltd.
- Ryan Johnson
- G01 - MEASURING TESTING
Information Patent Grant
System and method for improved indicated flow in mass flow controllers
- Patent number 10,473,500
- Issue date Nov 12, 2019
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G01 - MEASURING TESTING
Information Patent Grant
System and method for detecting concentration of a gas in a gas stream
- Patent number 10,295,518
- Issue date May 21, 2019
- Hitachi Metals, Ltd.
- Patrick Albright
- G01 - MEASURING TESTING
Information Patent Grant
Gas insensitive mass flow control systems and methods
- Patent number 10,126,761
- Issue date Nov 13, 2018
- Hitachi Metals, Ltd.
- Ryan Johnson
- G01 - MEASURING TESTING
Information Patent Grant
On-tool mass flow controller diagnostic systems and methods
- Patent number 10,041,825
- Issue date Aug 7, 2018
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Grant
Mass flow controller for improved performance across fluid types
- Patent number 9,898,013
- Issue date Feb 20, 2018
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Grant
On-tool mass flow controller diagnostic systems and methods
- Patent number 9,846,073
- Issue date Dec 19, 2017
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Grant
Mass flow controller with onboard diagnostics, prognostics, and dat...
- Patent number 9,766,635
- Issue date Sep 19, 2017
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Grant
On-tool mass flow controller diagnostic systems and methods
- Patent number 9,605,992
- Issue date Mar 28, 2017
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Grant
On-tool mass flow controller diagnostic systems and methods
- Patent number 9,488,516
- Issue date Nov 8, 2016
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Grant
Mass flow controller with onboard diagnostics, prognostics, and dat...
- Patent number 9,256,228
- Issue date Feb 9, 2016
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Grant
Mass flow controller and method for improved performance across flu...
- Patent number 9,146,563
- Issue date Sep 29, 2015
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Grant
Adaptive pressure insensitive mass flow controller and method for m...
- Patent number 9,027,585
- Issue date May 12, 2015
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Mass flow controller algorithm with adaptive valve start position
- Patent number 8,915,262
- Issue date Dec 23, 2014
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Grant
Mass flow controller hysteresis compensation system and method
- Patent number 8,671,973
- Issue date Mar 18, 2014
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Grant
Mass flow controller with enhanced operating range
- Patent number 8,499,786
- Issue date Aug 6, 2013
- Hitachi Metals, Ltd.
- Michael J. Zolock
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and mass flow controller for enhanced operating range
- Patent number 8,504,311
- Issue date Aug 6, 2013
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and system of on-tool and on-site MFC optimization providing...
- Patent number 8,321,060
- Issue date Nov 27, 2012
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Grant
Temperature insensitive mass flow controller
- Patent number 8,251,091
- Issue date Aug 28, 2012
- Hitachi Metals, Ltd.
- Michael J. Zolock
- G01 - MEASURING TESTING
Information Patent Grant
Thermal flow sensor with zero drift compensation
- Patent number 8,196,601
- Issue date Jun 12, 2012
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G01 - MEASURING TESTING
Information Patent Grant
Multi-mode control loop with improved performance for mass flow con...
- Patent number 8,195,312
- Issue date Jun 5, 2012
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Grant
Thermal mass flow sensor with improved response across fluid types
- Patent number 8,160,833
- Issue date Apr 17, 2012
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G01 - MEASURING TESTING
Information Patent Grant
Adaptive on-tool mass flow controller tuning
- Patent number 8,131,400
- Issue date Mar 6, 2012
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
MULTI-GAS MASS FLOW CONTROLLER AND METHOD
- Publication number 20210190575
- Publication date Jun 24, 2021
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G01 - MEASURING TESTING
Information Patent Application
PARASITIC FLOW CORRECTION METHOD AND APPARATUS
- Publication number 20210064067
- Publication date Mar 4, 2021
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G01 - MEASURING TESTING
Information Patent Application
HIGH FLOW TUBULAR BYPASS
- Publication number 20200284631
- Publication date Sep 10, 2020
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G01 - MEASURING TESTING
Information Patent Application
MULTI-CHAMBER RATE-OF-CHANGE SYSTEM FOR GAS FLOW VERIFICATION
- Publication number 20190361468
- Publication date Nov 28, 2019
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
THERMAL MASS FLOW SENSOR WITH IMPROVED ACCURACY
- Publication number 20190331515
- Publication date Oct 31, 2019
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Application
MASS FLOW CONTROLLER AND METHOD FOR CONTROLLING A MASS FLOW RATE OF...
- Publication number 20190265218
- Publication date Aug 29, 2019
- Hitachi Metals, Ltd.
- Patrick Albright
- G01 - MEASURING TESTING
Information Patent Application
GAS INSENSITIVE MASS FLOW CONTROL SYSTEMS AND METHODS
- Publication number 20180348798
- Publication date Dec 6, 2018
- Hitachi Metals, Ltd.
- Ryan Johnson
- G01 - MEASURING TESTING
Information Patent Application
ON-TOOL MASS FLOW CONTROLLER DIAGNOSTIC SYSTEMS AND METHODS
- Publication number 20180106658
- Publication date Apr 19, 2018
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G01 - MEASURING TESTING
Information Patent Application
ON-TOOL MASS FLOW CONTROLLER DIAGNOSTIC SYSTEMS AND METHODS
- Publication number 20170184441
- Publication date Jun 29, 2017
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G01 - MEASURING TESTING
Information Patent Application
GAS INSENSITIVE MASS FLOW CONTROL SYSTEMS AND METHODS
- Publication number 20170185091
- Publication date Jun 29, 2017
- Hitachi Metals, Ltd.
- Ryan Johnson
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR DETECTING CONCENTRATION OF A GAS IN A GAS STREAM
- Publication number 20170168035
- Publication date Jun 15, 2017
- Hitachi Metals, Ltd.
- Patrick Albright
- G01 - MEASURING TESTING
Information Patent Application
MASS FLOW CONTROLLER WITH ONBOARD DIAGNOSTICS, PROGNOSTICS, AND DAT...
- Publication number 20160139609
- Publication date May 19, 2016
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
MASS FLOW CONTROLLER FOR IMPROVED PERFORMANCE ACROSS FLUID TYPES
- Publication number 20150362924
- Publication date Dec 17, 2015
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Application
ON-TOOL MASS FLOW CONTROLLER DIAGNOSTIC SYSTEMS AND METHODS
- Publication number 20150260565
- Publication date Sep 17, 2015
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G01 - MEASURING TESTING
Information Patent Application
ON-TOOL MASS FLOW CONTROLLER DIAGNOSTIC SYSTEMS AND METHODS
- Publication number 20140260513
- Publication date Sep 18, 2014
- Alexei V. Smirnov
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR IMPROVED INDICATED FLOW IN MASS FLOW CONTROLLERS
- Publication number 20140257720
- Publication date Sep 11, 2014
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G01 - MEASURING TESTING
Information Patent Application
MASS FLOW CONTROLLER AND METHOD FOR IMPROVED PERFORMANCE ACROSS FLU...
- Publication number 20140246097
- Publication date Sep 4, 2014
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Adaptive Pressure Insensitive Mass Flow Controller and Method for M...
- Publication number 20130146148
- Publication date Jun 13, 2013
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
Mass Flow Controller Algorithm with Adaptive Valve Start Position
- Publication number 20130037112
- Publication date Feb 14, 2013
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
MASS FLOW CONTROLLER WITH ONBOARD DIAGNOSTICS, PROGNOSTICS, AND DAT...
- Publication number 20120186655
- Publication date Jul 26, 2012
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Application
Adaptive On-Tool Mass Flow Controller Tuning
- Publication number 20110307104
- Publication date Dec 15, 2011
- Advanced Energy Industries, Inc.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND SYSTEM OF ON-TOOL AND ON-SITE MFC OPTIMIZATION PROVIDING...
- Publication number 20110264281
- Publication date Oct 27, 2011
- Advanced Energy Industries, Inc.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND MASS FLOW CONTROLLER FOR ENHANCED OPERATING RANGE
- Publication number 20110247390
- Publication date Oct 13, 2011
- Advanced Energy Industries, Inc.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Application
MASS FLOW CONTROLLER WITH ENHANCED OPERATING RANGE
- Publication number 20110247696
- Publication date Oct 13, 2011
- Advanced Energy Industries, Inc.
- Michael J. Zolock
- G05 - CONTROLLING REGULATING
Information Patent Application
TEMPERATURE INSENSTIVE MASS FLOW CONTROLLER
- Publication number 20110061841
- Publication date Mar 17, 2011
- Advanced Energy Industries, Inc.
- Michael J. Zolock
- G01 - MEASURING TESTING
Information Patent Application
MULTI-MODE CONTROL LOOP WITH IMPROVED PERFORMANCE FOR MASS FLOW CON...
- Publication number 20110054702
- Publication date Mar 3, 2011
- Advanced Energy Industries, Inc.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Application
THERMAL MASS FLOW SENSOR WITH IMPROVED RESPONSE ACROSS FLUID TYPES
- Publication number 20110015791
- Publication date Jan 20, 2011
- Advanced Energy Industries, Inc.
- Alexei V. Smirnov
- G01 - MEASURING TESTING
Information Patent Application
Thermal Flow Sensor with Zero Drift Compensation
- Publication number 20100326539
- Publication date Dec 30, 2010
- Advanced Energy Industries, Inc.
- Alexei Smirnov
- G01 - MEASURING TESTING
Information Patent Application
Mass Flow Controller Hysteresis Compensation System & Method
- Publication number 20100180951
- Publication date Jul 22, 2010
- Advanced Energy Industries, Inc.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Application
MASS FLOW CONTROLLER AND METHOD OF OPERATING THE SAME
- Publication number 20100089459
- Publication date Apr 15, 2010
- Advanced Energy Industries, Inc.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING

Alexei V. Smirnov

Person

Patents Grantslast 30 patents

Mass flow controller utilizing nonlinearity component functions

Multi-chamber rate-of-change system for gas flow verification

Thermal mass flow sensor with improved accuracy

Parasitic flow correction method and apparatus

Multi-gas mass flow controller and method

High flow tubular bypass

Mass flow controller and method for controlling a mass flow rate of...

Gas insensitive mass flow control systems and methods

System and method for improved indicated flow in mass flow controllers

System and method for detecting concentration of a gas in a gas stream

Gas insensitive mass flow control systems and methods

On-tool mass flow controller diagnostic systems and methods

Mass flow controller for improved performance across fluid types

On-tool mass flow controller diagnostic systems and methods

Mass flow controller with onboard diagnostics, prognostics, and dat...

On-tool mass flow controller diagnostic systems and methods

On-tool mass flow controller diagnostic systems and methods

Mass flow controller with onboard diagnostics, prognostics, and dat...

Mass flow controller and method for improved performance across flu...

Adaptive pressure insensitive mass flow controller and method for m...

Mass flow controller algorithm with adaptive valve start position

Mass flow controller hysteresis compensation system and method

Mass flow controller with enhanced operating range

Method and mass flow controller for enhanced operating range

Method and system of on-tool and on-site MFC optimization providing...

Temperature insensitive mass flow controller

Thermal flow sensor with zero drift compensation

Multi-mode control loop with improved performance for mass flow con...

Thermal mass flow sensor with improved response across fluid types

Adaptive on-tool mass flow controller tuning

Patents Applicationslast 30 patents

MULTI-GAS MASS FLOW CONTROLLER AND METHOD

PARASITIC FLOW CORRECTION METHOD AND APPARATUS

HIGH FLOW TUBULAR BYPASS

MULTI-CHAMBER RATE-OF-CHANGE SYSTEM FOR GAS FLOW VERIFICATION

THERMAL MASS FLOW SENSOR WITH IMPROVED ACCURACY

MASS FLOW CONTROLLER AND METHOD FOR CONTROLLING A MASS FLOW RATE OF...

GAS INSENSITIVE MASS FLOW CONTROL SYSTEMS AND METHODS

ON-TOOL MASS FLOW CONTROLLER DIAGNOSTIC SYSTEMS AND METHODS

ON-TOOL MASS FLOW CONTROLLER DIAGNOSTIC SYSTEMS AND METHODS

GAS INSENSITIVE MASS FLOW CONTROL SYSTEMS AND METHODS

SYSTEM AND METHOD FOR DETECTING CONCENTRATION OF A GAS IN A GAS STREAM

MASS FLOW CONTROLLER WITH ONBOARD DIAGNOSTICS, PROGNOSTICS, AND DAT...

MASS FLOW CONTROLLER FOR IMPROVED PERFORMANCE ACROSS FLUID TYPES

ON-TOOL MASS FLOW CONTROLLER DIAGNOSTIC SYSTEMS AND METHODS

ON-TOOL MASS FLOW CONTROLLER DIAGNOSTIC SYSTEMS AND METHODS

SYSTEM AND METHOD FOR IMPROVED INDICATED FLOW IN MASS FLOW CONTROLLERS

MASS FLOW CONTROLLER AND METHOD FOR IMPROVED PERFORMANCE ACROSS FLU...

Adaptive Pressure Insensitive Mass Flow Controller and Method for M...

Mass Flow Controller Algorithm with Adaptive Valve Start Position

MASS FLOW CONTROLLER WITH ONBOARD DIAGNOSTICS, PROGNOSTICS, AND DAT...

Adaptive On-Tool Mass Flow Controller Tuning

METHOD AND SYSTEM OF ON-TOOL AND ON-SITE MFC OPTIMIZATION PROVIDING...

METHOD AND MASS FLOW CONTROLLER FOR ENHANCED OPERATING RANGE

MASS FLOW CONTROLLER WITH ENHANCED OPERATING RANGE

TEMPERATURE INSENSTIVE MASS FLOW CONTROLLER

MULTI-MODE CONTROL LOOP WITH IMPROVED PERFORMANCE FOR MASS FLOW CON...

THERMAL MASS FLOW SENSOR WITH IMPROVED RESPONSE ACROSS FLUID TYPES

Thermal Flow Sensor with Zero Drift Compensation

Mass Flow Controller Hysteresis Compensation System & Method

MASS FLOW CONTROLLER AND METHOD OF OPERATING THE SAME