Alexey Olegovich POLYAKOV

Person

Veldhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Inspection system, lithographic apparatus, and inspection method
- Patent number 12,313,980
- Issue date May 27, 2025
- ASML Netherlands B.V.
- Alexey Olegovich Polyakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmissive diffusor
- Patent number 12,271,008
- Issue date Apr 8, 2025
- ASML Netherlands B.V.
- Andrey Nikipelov
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Particle beam apparatus, defect repair method, lithographic exposur...
- Patent number 11,996,267
- Issue date May 28, 2024
- ASML Netherlands B.V.
- Ruben Cornelis Maas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic patterning process and resists to use therein
- Patent number 11,415,886
- Issue date Aug 16, 2022
- ASML Netherlands B.V.
- Sander Frederik Wuister
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pick-and-place tool having multiple pick up elements
- Patent number 11,232,960
- Issue date Jan 25, 2022
- ASML Netherlands B.V.
- Yang-Shan Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Information determining apparatus and method
- Patent number 10,948,837
- Issue date Mar 16, 2021
- ASML Netherlands B.V.
- An Gao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metrology methods, radiation source, metrology apparatus and device...
- Patent number 10,555,407
- Issue date Feb 4, 2020
- ASML Netherlands B.V.
- Alexey Olegovich Polyakov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Lithographic patterning process and resists to use therein
- Patent number 10,416,555
- Issue date Sep 17, 2019
- ASML Netherlands B.V.
- Sander Frederik Wuister
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology methods, radiation source, metrology apparatus and device...
- Patent number 10,342,108
- Issue date Jul 2, 2019
- ASML Netherlands B.V.
- Alexey Olegovich Polyakov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL
- Publication number 20230350301
- Publication date Nov 2, 2023
- ASML NETHERLANDS B.V.
- Evgenia KURGANOVA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL
- Publication number 20220213593
- Publication date Jul 7, 2022
- ASML NETHERLANDS B.V.
- Tamara DRUZHININA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSMISSIVE DIFFUSOR
- Publication number 20210382209
- Publication date Dec 9, 2021
- ASML NETHERLANDS B.V.
- Andrey NIKIPELOV
- B82 - NANO-TECHNOLOGY
Information Patent Application
PARTICLE BEAM APPARATUS, DEFECT REPAIR METHOD, LITHOGRAPHIC EXPOSUR...
- Publication number 20210327678
- Publication date Oct 21, 2021
- ASML NETHERLANDS B.V.
- Ruben Cornelis MAAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL
- Publication number 20210079519
- Publication date Mar 18, 2021
- ASML NETHERLANDS B.V.
- Pieter Willem Herman DE JAGER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INSPECTION SYSTEM, LITHOGRAPHIC APPARATUS, AND INSPECTION METHOD
- Publication number 20210055660
- Publication date Feb 25, 2021
- ASML NETHERLANDS B.V.
- Alexey Olegovich POLYAKOV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INFORMATION DETERMINING APPARATUS AND METHOD
- Publication number 20200159134
- Publication date May 21, 2020
- ASML NETHERLANDS B.V.
- An GAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Lithographic Patterning Process and Resists to Use Therein
- Publication number 20190339615
- Publication date Nov 7, 2019
- ASML NETHERLANDS B.V.
- Sander Frederik WUISTER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Metrology Methods, Radiation Source, Metrology Apparatus and Device...
- Publication number 20190246480
- Publication date Aug 8, 2019
- ASML NETHERLANDS B.V.
- Alexey Olegovich POLYAKOV
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
MULTIPLE MINIATURE PICK UP ELEMENTS FOR A COMPONENT STACKING AND/OR...
- Publication number 20190148189
- Publication date May 16, 2019
- ASML NETHERLANDS B.V.
- Yang-Shan HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Metrology Methods, Radiation Source, Metrology Apparatus and Device...
- Publication number 20180220518
- Publication date Aug 2, 2018
- ASML NETHERLANDS B.V.
- Alexey Olegovich POLYAKOV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Lithographic Patterning Process and Resists to Use Therein
- Publication number 20180004085
- Publication date Jan 4, 2018
- ASML NETHERLANDS B.V.
- Sander Frederik WUISTER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Alexey Olegovich POLYAKOV

Person

Patents Grantslast 30 patents

Inspection system, lithographic apparatus, and inspection method

Transmissive diffusor

Particle beam apparatus, defect repair method, lithographic exposur...

Lithographic patterning process and resists to use therein

Pick-and-place tool having multiple pick up elements

Information determining apparatus and method

Metrology methods, radiation source, metrology apparatus and device...

Lithographic patterning process and resists to use therein

Metrology methods, radiation source, metrology apparatus and device...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL

METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL

TRANSMISSIVE DIFFUSOR

PARTICLE BEAM APPARATUS, DEFECT REPAIR METHOD, LITHOGRAPHIC EXPOSUR...

METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL

INSPECTION SYSTEM, LITHOGRAPHIC APPARATUS, AND INSPECTION METHOD

INFORMATION DETERMINING APPARATUS AND METHOD

Lithographic Patterning Process and Resists to Use Therein

Metrology Methods, Radiation Source, Metrology Apparatus and Device...

MULTIPLE MINIATURE PICK UP ELEMENTS FOR A COMPONENT STACKING AND/OR...

Metrology Methods, Radiation Source, Metrology Apparatus and Device...

Lithographic Patterning Process and Resists to Use Therein