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Alexis P. deChambrier
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Burbank, CA, US
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last 30 patents
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Patent Grant
High density plasma deposition and etching apparatus
Patent number
5,429,070
Issue date
Jul 4, 1995
Plasma & Materials Technologies, Inc.
Gregor A. Campbell
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
High density plasma deposition and etching apparatus
Patent number
5,122,251
Issue date
Jun 16, 1992
Plasma & Materials Technologies, Inc.
Gregor A. Campbell
H01 - BASIC ELECTRIC ELEMENTS