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Alferd Cofer
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Fremont, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Notch stop pulsing process for plasma processing system
Patent number
7,985,688
Issue date
Jul 26, 2011
Lam Research Corporation
Tamarak Pandhumsoporn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for sequentially alternating among plasma pro...
Patent number
7,459,100
Issue date
Dec 2, 2008
Lam Research Corporation
Adrian Kiermasz
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for minimizing mask undercuts and notches for plasma proces...
Patent number
7,351,664
Issue date
Apr 1, 2008
Lam Research Corporation
Tamarak Pandhumsoporn
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
METHODS FOR MINIMIZING MASK UNDERCUTS AND NOTCHES FOR PLASMA PROCES...
Publication number
20070281489
Publication date
Dec 6, 2007
Tamarak Pandhumsoporn
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Notch stop pulsing process for plasma processing system
Publication number
20070141847
Publication date
Jun 21, 2007
Tamarak Pandhumsoporn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods and apparatus for sequentially alternating among plasma pro...
Publication number
20060131271
Publication date
Jun 22, 2006
Adrian Kiermasz
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...