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Alfred Goldspeil
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Watsonville, CA, US
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last 30 patents
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Patent Grant
Method of fabricating an electrostatic chuck
Patent number
6,557,248
Issue date
May 6, 2003
Applied Materials Inc.
Shamouil Shamouilian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Electrostatic chuck with improved erosion resistance
Patent number
6,023,405
Issue date
Feb 8, 2000
Applied Materials, Inc.
Shamouil Shamouilian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...