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Ali Sucipto Tan
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Vacuum pump protection against deposition byproduct buildup
Patent number
12,087,561
Issue date
Sep 10, 2024
Lam Research Corporation
John Stephen Drewery
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum pump protection against deposition byproduct buildup
Patent number
11,710,623
Issue date
Jul 25, 2023
Lam Research Corporation
John Stephen Drewery
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum pump protection against deposition byproduct buildup
Patent number
11,031,215
Issue date
Jun 8, 2021
Lam Research Corporation
John Stephen Drewery
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Edge ring centering method using ring dynamic alignment data
Patent number
10,541,168
Issue date
Jan 21, 2020
Lam Research Corporation
Ali Sucipto Tan
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP
Publication number
20230317437
Publication date
Oct 5, 2023
LAM RESEARCH CORPORATION
John Stephen Drewery
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP
Publication number
20210257195
Publication date
Aug 19, 2021
LAM RESEARCH CORPORATION
John Stephen DREWERY
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP
Publication number
20200105509
Publication date
Apr 2, 2020
LAM RESEARCH CORPORATION
John Stephen Drewery
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EDGE RING CENTERING METHOD USING RING DYNAMIC ALIGNMENT DATA
Publication number
20180138069
Publication date
May 17, 2018
LAM RESEARCH CORPORATION
Ali Sucipto Tan
H01 - BASIC ELECTRIC ELEMENTS