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Alida Wuertz
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Marbach, DE
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last 30 patents
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Patent Application
MANUFACTURING PROCESS FOR INTEGRATED MICROELECTROMECHANICAL COMPONENTS
Publication number
20090017305
Publication date
Jan 15, 2009
Franz Dietz
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
INTEGRATED ARRANGEMENT AND METHOD FOR PRODUCTION
Publication number
20080217149
Publication date
Sep 11, 2008
Ulrich Schmid
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
SEMICONDUCTOR ARRAY AND METHOD FOR MANUFACTURING A SEMICONDUCTOR ARRAY
Publication number
20080099860
Publication date
May 1, 2008
Alida Wuertz
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
Manufacturing process for integrated piezo elements
Publication number
20070202628
Publication date
Aug 30, 2007
ATMEL GERMANY GMBH
Alida Wuertz
B81 - MICRO-STRUCTURAL TECHNOLOGY