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Alje Geert Dunning
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Delft, NL
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last 30 patents
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Patent Grant
Support module for lithography system
Patent number
9,447,839
Issue date
Sep 20, 2016
Mapper Lithography IP B.V.
Alje Geert Dunning
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Patents Applications
last 30 patents
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Patent Application
SUPPORT MODULE FOR LITHOGRAPHY SYSTEM
Publication number
20150014510
Publication date
Jan 15, 2015
MAPPER LITHOGRAPHY IP BV
Alje Geert Dunning
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...