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Allan L. Sagle
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Berkeley, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Method and apparatus for dynamic space-time imaging system
Patent number
7,961,912
Issue date
Jun 14, 2011
Glen R. Stevick
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Multiple electron beam lithography system with multiple beam modula...
Patent number
6,724,002
Issue date
Apr 20, 2004
Applied Materials, Inc.
Marian Mankos
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Minimization of electron fogging in electron beam lithography
Patent number
6,326,635
Issue date
Dec 4, 2001
Etec Systems, Inc.
Robert Innes
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Raster shaped beam, electron beam exposure strategy using a two dim...
Patent number
6,262,429
Issue date
Jul 17, 2001
Etec Systems, Inc.
Stephen A. Rishton
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
Method and apparatus for dynamic space-time imaging system
Publication number
20070299338
Publication date
Dec 27, 2007
Glen R. Stevick
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
Multiple electron beam lithography system with multiple beam modula...
Publication number
20030042434
Publication date
Mar 6, 2003
Marian Mankos
B82 - NANO-TECHNOLOGY
Information
Patent Application
Raster shaped beam, electron beam exposure strategy using a two dim...
Publication number
20020104970
Publication date
Aug 8, 2002
Stacey J. Winter
B82 - NANO-TECHNOLOGY