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Allan M. Radman
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Aptos, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Spherical cap-shaped polishing head in a chemical mechanical polish...
Patent number
6,910,949
Issue date
Jun 28, 2005
Lam Research Corporation
Allan M. Radman
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for conditioning a polishing pad with sonic en...
Patent number
6,875,091
Issue date
Apr 5, 2005
Lam Research Corporation
Allan M. Radman
B24 - GRINDING POLISHING
Information
Patent Grant
Double-sided wafer edge scrubbing apparatus and method for using th...
Patent number
6,550,091
Issue date
Apr 22, 2003
Lam Research Corporation
Allan Radman
B08 - CLEANING
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Patent Grant
Methods for cleaning substrate surfaces after etch operations
Patent number
6,187,684
Issue date
Feb 13, 2001
Lam Research Corporation
Jeffrey J. Farber
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method and apparatus for conditioning a polishing pad with sonic en...
Publication number
20020086622
Publication date
Jul 4, 2002
Lam Research Corporation
Allan M. Radman
B24 - GRINDING POLISHING
Information
Patent Application
HIGH RPM MEGASONIC CLEANING
Publication number
20010047810
Publication date
Dec 6, 2001
JEFF FARBER
B08 - CLEANING