Allan Ronne

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing devices having multi-port valve assemblies
- Patent number 12,100,575
- Issue date Sep 24, 2024
- Lam Research Corporation
- Daniel A. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Moving substrate transfer chamber
- Patent number 11,282,737
- Issue date Mar 22, 2022
- Lam Research Corporation
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing devices having multi-port valve assemblies
- Patent number 10,037,869
- Issue date Jul 31, 2018
- Lam Research Corporation
- Daniel A. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead electrode assembly with gas flow modification for extend...
- Patent number 9,093,483
- Issue date Jul 28, 2015
- Lam Research Corporation
- Jason Augustino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled window of a plasma processing chamber component
- Patent number 8,970,114
- Issue date Mar 3, 2015
- Lam Research Corporation
- Matt Busche
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for cleaning gas injectors
- Patent number 8,945,317
- Issue date Feb 3, 2015
- Lam Research Corporation
- Armen Avoyan
- B08 - CLEANING
Information Patent Grant
Automated bubble detection apparatus and method
- Patent number 8,854,451
- Issue date Oct 7, 2014
- Lam Research Corporation
- Josh Cormier
- G01 - MEASURING TESTING
Information Patent Grant
Upper electrode backing member with particle reducing features
- Patent number 8,709,202
- Issue date Apr 29, 2014
- Lam Research Corporation
- Anthony De La Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead electrode assembly with gas flow modification for extend...
- Patent number 8,702,866
- Issue date Apr 22, 2014
- Lam Research Corporation
- Jason Augustino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum sealing radio frequency (RF) and low frequency conducting ac...
- Patent number 8,597,428
- Issue date Dec 3, 2013
- Lam Research Corporation
- Danny Brown
- F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information Patent Grant
Upper electrode backing member with particle reducing features
- Patent number 7,854,820
- Issue date Dec 21, 2010
- Lam Research Corporation
- Anthony De La Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for shielding process chamber port
- Patent number 7,685,965
- Issue date Mar 30, 2010
- Lam Research Corporation
- Fangli J. Hao
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HIGH-CONDUCTANCE VACUUM VALVES FOR WAFER PROCESSING SYSTEMS
- Publication number 20230360894
- Publication date Nov 9, 2023
- LAM RESEARCH CORPORATION
- Gabriel Pioux
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADAPTER PLATE TO ATTACH TURBO PUMPS TO PROCESS MODULES
- Publication number 20230114538
- Publication date Apr 13, 2023
- LAM RESEARCH CORPORATION
- Bin YUAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVING SUBSTRATE TRANSFER CHAMBER
- Publication number 20200381285
- Publication date Dec 3, 2020
- LAM RESEARCH CORPORATION
- Daniel Arthur BROWN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING DEVICES HAVING MULTI-PORT VALVE ASSEMBLIES
- Publication number 20180323041
- Publication date Nov 8, 2018
- LAM RESEARCH CORPORATION
- Daniel A. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-SUSTAINED IN-SITU THERMAL CONTROL APPARATUS
- Publication number 20170191685
- Publication date Jul 6, 2017
- LAM RESEARCH CORPORATION
- Allan Ronne
- F24 - HEATING RANGES VENTILATING
Information Patent Application
Systems Comprising Silicon Coated Gas Supply Conduits and Methods f...
- Publication number 20170040147
- Publication date Feb 9, 2017
- LAM RESEARCH CORPORATION
- Hong Shih
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PLASMA PROCESSING DEVICES HAVING MULTI-PORT VALVE ASSEMBLIES
- Publication number 20160033977
- Publication date Feb 4, 2016
- LAM RESEARCH CORPORATION
- Daniel A. Brown
- G05 - CONTROLLING REGULATING
Information Patent Application
Plasma Processing Devices Having Multi-Port Valve Assemblies
- Publication number 20150047785
- Publication date Feb 19, 2015
- LAM RESEARCH CORPORATION
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROLLED WINDOW OF A PLASMA PROCESSING CHAMBER COMPONENT
- Publication number 20140217895
- Publication date Aug 7, 2014
- LAM RESEARCH CORPORATION
- Matt Busche
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD ELECTRODE ASSEMBLY WITH GAS FLOW MODIFICATION FOR EXTEND...
- Publication number 20140187049
- Publication date Jul 3, 2014
- LAM RESEARCH CORPORATION
- Jason Augustino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNGSTEN CARBIDE COATED METAL COMPONENT OF A PLASMA REACTOR CHAMBER...
- Publication number 20140113453
- Publication date Apr 24, 2014
- LAM RESEARCH CORPORATION
- Hong Shih
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SYSTEM AND METHOD FOR CLEANING GAS INJECTORS
- Publication number 20130146095
- Publication date Jun 13, 2013
- LAM RESEARCH CORPORATION
- Armen Avoyan
- B08 - CLEANING
Information Patent Application
Systems Comprising Silicon Coated Gas Supply Conduits And Methods F...
- Publication number 20130105083
- Publication date May 2, 2013
- LAM RESEARCH CORPORATION
- Hong Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED BUBBLE DETECTION APPARATUS AND METHOD
- Publication number 20130100278
- Publication date Apr 25, 2013
- LAM RESEARCH CORPORATION
- Josh Cormier
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
UPPER ELECTRODE BACKING MEMBER WITH PARTICLE REDUCING FEATURES
- Publication number 20110086513
- Publication date Apr 14, 2011
- LAM RESEARCH CORPORATION
- Anthony De La Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM SEALING RADIO FREQUENCY (RF) AND LOW FREQUENCY CONDUCTING AC...
- Publication number 20090152958
- Publication date Jun 18, 2009
- LAM RESEARCH CORPORATION
- Danny Brown
- F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information Patent Application
Showerhead electrode assembly with gas flow modification for extend...
- Publication number 20080141941
- Publication date Jun 19, 2008
- LAM RESEARCH CORPORATION
- Jason Augustino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Upper electrode backing member with particle reducing features
- Publication number 20080090417
- Publication date Apr 17, 2008
- LAM RESEARCH CORPORATION
- Anthony De La Llera
- H01 - BASIC ELECTRIC ELEMENTS

Allan Ronne

Person

Patents Grantslast 30 patents

Plasma processing devices having multi-port valve assemblies

Moving substrate transfer chamber

Plasma processing devices having multi-port valve assemblies

Showerhead electrode assembly with gas flow modification for extend...

Temperature controlled window of a plasma processing chamber component

System and method for cleaning gas injectors

Automated bubble detection apparatus and method

Upper electrode backing member with particle reducing features

Showerhead electrode assembly with gas flow modification for extend...

Vacuum sealing radio frequency (RF) and low frequency conducting ac...

Upper electrode backing member with particle reducing features

Apparatus for shielding process chamber port

Patents Applicationslast 30 patents

HIGH-CONDUCTANCE VACUUM VALVES FOR WAFER PROCESSING SYSTEMS

ADAPTER PLATE TO ATTACH TURBO PUMPS TO PROCESS MODULES

MOVING SUBSTRATE TRANSFER CHAMBER

PLASMA PROCESSING DEVICES HAVING MULTI-PORT VALVE ASSEMBLIES

SELF-SUSTAINED IN-SITU THERMAL CONTROL APPARATUS

Systems Comprising Silicon Coated Gas Supply Conduits and Methods f...

PLASMA PROCESSING DEVICES HAVING MULTI-PORT VALVE ASSEMBLIES

Plasma Processing Devices Having Multi-Port Valve Assemblies

TEMPERATURE CONTROLLED WINDOW OF A PLASMA PROCESSING CHAMBER COMPONENT

SHOWERHEAD ELECTRODE ASSEMBLY WITH GAS FLOW MODIFICATION FOR EXTEND...

TUNGSTEN CARBIDE COATED METAL COMPONENT OF A PLASMA REACTOR CHAMBER...

SYSTEM AND METHOD FOR CLEANING GAS INJECTORS

Systems Comprising Silicon Coated Gas Supply Conduits And Methods F...

AUTOMATED BUBBLE DETECTION APPARATUS AND METHOD

UPPER ELECTRODE BACKING MEMBER WITH PARTICLE REDUCING FEATURES

VACUUM SEALING RADIO FREQUENCY (RF) AND LOW FREQUENCY CONDUCTING AC...

Showerhead electrode assembly with gas flow modification for extend...

Upper electrode backing member with particle reducing features