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Selective etching of silicon wafer
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Patent number 11,322,361
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Issue date May 3, 2022
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International Business Machines Corporation
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Da Song
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Selective etching of silicon wafer
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Patent number 9,378,966
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Issue date Jun 28, 2016
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International Business Machines Corporation
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Brown C. Peethala
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Wafer backside particle mitigation
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Patent number 9,318,347
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Issue date Apr 19, 2016
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International Business Machines Corporation
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Marc A. Bergendahl
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H01 - BASIC ELECTRIC ELEMENTS
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Wafer backside particle mitigation
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Patent number 9,184,042
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Issue date Nov 10, 2015
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International Business Machines Corporation
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Marc A. Bergendahl
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H01 - BASIC ELECTRIC ELEMENTS
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