Membership
Tour
Register
Log in
Allan Weed
Follow
Person
Marblehead, MA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Multiple diameter in-vacuum wafer handling
Patent number
9,911,636
Issue date
Mar 6, 2018
Axcelis Technologies, Inc.
Allan D. Weed
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heated electrostatic chuck including mechanical clamp capability at...
Patent number
8,941,968
Issue date
Jan 27, 2015
Axcelis Technologies, Inc.
Perry J. I. Justesen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heated annulus chuck
Patent number
8,797,706
Issue date
Aug 5, 2014
Axcelis Technologies, Inc.
William Davis Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bin transporter system
Patent number
7,954,627
Issue date
Jun 7, 2011
BTSystems, LLC
Brian C. Weed
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Workpiece gripping device
Patent number
7,789,443
Issue date
Sep 7, 2010
Axcelis Technologies, Inc.
Joseph Gillespie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Work-piece treatment system having load lock and buffer
Patent number
7,010,388
Issue date
Mar 7, 2006
Axcelis Technologies, Inc.
Robert J. Mitchell
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Alignment structure and method for mating a wafer delivery device t...
Patent number
6,914,251
Issue date
Jul 5, 2005
Axcelis Technologies, Inc.
Steven D. Weed
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer pedestal tilt mechanism and cooling system
Patent number
6,734,439
Issue date
May 11, 2004
Allan Weed
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer pedestal tilt mechanism
Patent number
6,727,509
Issue date
Apr 27, 2004
Michel Pharand
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Lateral stress relief mechanism for vacuum bellows
Patent number
6,065,499
Issue date
May 23, 2000
Eaton Corporation
Alexander F. Pless
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Patents Applications
last 30 patents
Information
Patent Application
ADJUSTABLE CIRCUMFERENCE ELECTROSTATIC CLAMP
Publication number
20180096875
Publication date
Apr 5, 2018
Axcelis Technologies, Inc.
Allan D. Weed
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEATED ANNULUS CHUCK
Publication number
20110299218
Publication date
Dec 8, 2011
Axcelis Technologies, Inc.
William Davis Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEATED ELECTROSTATIC CHUCK INCLUDING MECHANICAL CLAMP CAPABILITY AT...
Publication number
20110299217
Publication date
Dec 8, 2011
Axcelis Technologies, Inc.
Perry J.I. Justesen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BIN TRANSPORTER SYSTEM
Publication number
20080232938
Publication date
Sep 25, 2008
BTSYSTEMS, LLC
Brian C. Weed
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Application
Workpiece Gripping Device
Publication number
20080224491
Publication date
Sep 18, 2008
Axcelis Technologies, Inc.
Joseph Gillespie
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
Work-piece treatment system having load lock and buffer
Publication number
20040234359
Publication date
Nov 25, 2004
Axcelis Technologies, Inc.
Robert J. Mitchell
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wafer pedestal tilt mechanism
Publication number
20030111617
Publication date
Jun 19, 2003
Michel Pharand
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
Wafer pedestal tilt mechanism and cooling system
Publication number
20030080300
Publication date
May 1, 2003
Allan Weed
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wafer pedestal tilt mechanism and cooling system
Publication number
20030070316
Publication date
Apr 17, 2003
Allan Weed
H01 - BASIC ELECTRIC ELEMENTS