Allard Eelco Kooiker

Person

Waalre, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Object table comprising an electrostatic clamp
- Patent number 12,028,000
- Issue date Jul 2, 2024
- ASML Netherlands B.V.
- Jan-Gerard Cornelis Van Der Toorn
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Stage apparatus suitable for a particle beam apparatus
- Patent number 11,908,656
- Issue date Feb 20, 2024
- ASML Netherlands B.V.
- Han Willem Hendrik Severt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage apparatus suitable for electron beam inspection apparatus
- Patent number 11,764,030
- Issue date Sep 19, 2023
- ASML Netherlands B.V.
- Johannes Hubertus Antonius Van De Rijdt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Object table comprising an electrostatic clamp
- Patent number 11,637,512
- Issue date Apr 25, 2023
- ASML Netherlands B.V.
- Jan-Gerard Cornelis Van Der Toorn
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Encoder, position measurement system and lithographic apparatus inv...
- Patent number 10,768,025
- Issue date Sep 8, 2020
- ASML Netherlands B.V.
- Wouter Onno Pril
- G01 - MEASURING TESTING
Information Patent Grant
Sensor, lithographic apparatus and device manufacturing method
- Patent number 9,971,254
- Issue date May 15, 2018
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sensor, lithographic apparatus and device manufacturing method
- Patent number 9,753,382
- Issue date Sep 5, 2017
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Detector module, cooling arrangement and lithographic apparatus com...
- Patent number 9,081,309
- Issue date Jul 14, 2015
- ASML Netherlands B.V.
- Bastiaan Andreas Wilhelmus Hubertus Knarren
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cooling arrangement and lithographic apparatus comprising a resilie...
- Patent number 8,817,228
- Issue date Aug 26, 2014
- ASML Netherland B.V.
- Bastiaan Andreas Wilhelmus Hubertus Knarren
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP
- Publication number 20240396476
- Publication date Nov 28, 2024
- ASML NETHERLANDS B.V.
- Jan-Gerard Cornelis VAN DER TOORN
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP
- Publication number 20230246568
- Publication date Aug 3, 2023
- ASML NETHERLANDS B.V.
- Jan-Gerard Cornelis VAN DER TOORN
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
APPARATUS FOR USE IN A METROLOGY PROCESS OR LITHOGRAPHIC PROCESS
- Publication number 20230205101
- Publication date Jun 29, 2023
- ASML NETHERLANDS B.V.
- Luuc KEULEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE APPARATUS SUITABLE FOR A PARTICLE BEAM APPARATUS
- Publication number 20220028648
- Publication date Jan 27, 2022
- ASML NETHERLANDS B.V.
- Han Willem Hendrik SEVERT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP
- Publication number 20210313908
- Publication date Oct 7, 2021
- ASML NETHERLANDS B.V.
- Jan-Gerard Cornelis VAN DER TOORN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE APPARATUS SUITABLE FOR ELECTRON BEAM INSPECTION APPARATUS
- Publication number 20200194222
- Publication date Jun 18, 2020
- ASML NETHERLANDS B.V.
- Johannes Hubertus Antonius VAN DE RIJDT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170363964
- Publication date Dec 21, 2017
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu LAURENT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ENCODER, POSITION MEASUREMENT SYSTEM AND LITHOGRAPHIC APPARATUS
- Publication number 20170343390
- Publication date Nov 30, 2017
- ASML NETHERLANDS B.V.
- Wouter Onno PRIL
- G01 - MEASURING TESTING
Information Patent Application
SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20150077728
- Publication date Mar 19, 2015
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Detector Module, Cooling Arrangement And Lithographic Apparatus Com...
- Publication number 20120075607
- Publication date Mar 29, 2012
- ASML NETHERLANDS B.V.
- Bastiaan Andreas Wilhelmus Hubertus Knarren
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Cooling Device, Cooling Arrangement and Lithographic Apparatus Comp...
- Publication number 20100259734
- Publication date Oct 14, 2010
- ASML NETHERLANDS B.V.
- Bastiaan Andreas Wilhelmus Hubertus KNARREN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Allard Eelco Kooiker

Person

Patents Grantslast 30 patents

Object table comprising an electrostatic clamp

Stage apparatus suitable for a particle beam apparatus

Stage apparatus suitable for electron beam inspection apparatus

Object table comprising an electrostatic clamp

Encoder, position measurement system and lithographic apparatus inv...

Sensor, lithographic apparatus and device manufacturing method

Sensor, lithographic apparatus and device manufacturing method

Detector module, cooling arrangement and lithographic apparatus com...

Cooling arrangement and lithographic apparatus comprising a resilie...

Patents Applicationslast 30 patents

OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP

OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP

APPARATUS FOR USE IN A METROLOGY PROCESS OR LITHOGRAPHIC PROCESS

STAGE APPARATUS SUITABLE FOR A PARTICLE BEAM APPARATUS

OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP

STAGE APPARATUS SUITABLE FOR ELECTRON BEAM INSPECTION APPARATUS

SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

ENCODER, POSITION MEASUREMENT SYSTEM AND LITHOGRAPHIC APPARATUS

SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Detector Module, Cooling Arrangement And Lithographic Apparatus Com...

Cooling Device, Cooling Arrangement and Lithographic Apparatus Comp...