Allen M. Carroll

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for compressed data transmission in a maskless li...
- Patent number 9,245,714
- Issue date Jan 26, 2016
- KLA-Tencor Corporation
- Allen M. Carroll
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Pillar-supported array of micro electron lenses
- Patent number 9,214,344
- Issue date Dec 15, 2015
- KLA-Tencor Corporation
- Alan D. Brodie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of measuring overlay errors in area-imaging e-beam lithography
- Patent number 9,081,287
- Issue date Jul 14, 2015
- KLA-Tencor Corporation
- Walter D. Mieher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern data system for high-performance maskless electron beam lit...
- Patent number 8,893,059
- Issue date Nov 18, 2014
- KLA-Tencor Corporation
- Allen Carroll
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Quasi-annular reflective electron patterning device
- Patent number 8,373,144
- Issue date Feb 12, 2013
- KLA-Tencor Corporation
- Mark A. McCord
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam patterning
- Patent number 7,958,464
- Issue date Jun 7, 2011
- KLA-Tencor Corporation
- Luca Grella
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam lithography method and apparatus using a dynamically...
- Patent number 7,696,498
- Issue date Apr 13, 2010
- KLA-Tencor Technologies Corporation
- Allen M. Carroll
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PILLAR-SUPPORTED ARRAY OF MICRO ELECTRON LENSES
- Publication number 20150340195
- Publication date Nov 26, 2015
- KLA-Tencor Corporation
- Alan D. BRODIE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF MEASURING OVERLAY ERRORS IN AREA-IMAGING E-BEAM LITHOGR...
- Publication number 20140199618
- Publication date Jul 17, 2014
- KLA-Tencor Corporation
- Walter D. MIEHER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and Method for Compressed Data Transmission in a Maskless Li...
- Publication number 20140097362
- Publication date Apr 10, 2014
- KLA-Tencor Corporation
- Allen M. Carroll
- B82 - NANO-TECHNOLOGY
Information Patent Application
PATTERN DATA SYSTEM FOR HIGH-PERFORMANCE MASKLESS ELECTRON BEAM LIT...
- Publication number 20130205267
- Publication date Aug 8, 2013
- KLA-Tencor Corporation
- Allen CARROLL
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHODS FOR PATTERN GENERATION
- Publication number 20120085919
- Publication date Apr 12, 2012
- Shinichi KOJIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTRON BEAM LITHOGRAPHY METHOD AND APPARATUS USING A DYNAMICALLY...
- Publication number 20080169436
- Publication date Jul 17, 2008
- KLA-Tencor Techologies Corporation
- Allen M. Carroll
- B82 - NANO-TECHNOLOGY

Allen M. Carroll

Person

Patents Grantslast 30 patents

System and method for compressed data transmission in a maskless li...

Pillar-supported array of micro electron lenses

Methods of measuring overlay errors in area-imaging e-beam lithography

Pattern data system for high-performance maskless electron beam lit...

Quasi-annular reflective electron patterning device

Electron beam patterning

Electron beam lithography method and apparatus using a dynamically...

Patents Applicationslast 30 patents

PILLAR-SUPPORTED ARRAY OF MICRO ELECTRON LENSES

METHODS OF MEASURING OVERLAY ERRORS IN AREA-IMAGING E-BEAM LITHOGR...

System and Method for Compressed Data Transmission in a Maskless Li...

PATTERN DATA SYSTEM FOR HIGH-PERFORMANCE MASKLESS ELECTRON BEAM LIT...

APPARATUS AND METHODS FOR PATTERN GENERATION

ELECTRON BEAM LITHOGRAPHY METHOD AND APPARATUS USING A DYNAMICALLY...