Allen Park

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Measurement of overlay error using device inspection system
- Patent number 11,784,097
- Issue date Oct 10, 2023
- KLA-Tencor Corporation
- Choon Hoong Hoo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for mixed mode wafer inspection
- Patent number 11,295,438
- Issue date Apr 5, 2022
- KLA Corporation
- Jason Z. Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Measurement of overlay error using device inspection system
- Patent number 10,943,838
- Issue date Mar 9, 2021
- KLA-Tencor Corporation
- Choon Hoong Hoo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Using stochastic failure metrics in semiconductor manufacturing
- Patent number 10,818,001
- Issue date Oct 27, 2020
- KLA-Tencor Corporation
- Wing-Shan Ribi Leung
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Hybrid design layout to identify optical proximity correction-relat...
- Patent number 10,796,065
- Issue date Oct 6, 2020
- KLA-Tencor Corporation
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Computer assisted weak pattern detection and quantification system
- Patent number 10,740,888
- Issue date Aug 11, 2020
- KLA-Tencor Corporation
- Naoshin Haque
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Self directed metrology and pattern classification
- Patent number 10,483,081
- Issue date Nov 19, 2019
- KLA-Tencor Corp.
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Determining one or more characteristics of a pattern of interest on...
- Patent number 10,359,371
- Issue date Jul 23, 2019
- KLA-Tencor Corp.
- Brian Duffy
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System, method and computer program product for systematic and stoc...
- Patent number 10,262,408
- Issue date Apr 16, 2019
- KLA-Tencor Corporation
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for weak pattern quantification
- Patent number 10,262,831
- Issue date Apr 16, 2019
- KLA-Tencor Corporation
- Andrew Cross
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Based device risk assessment
- Patent number 10,223,492
- Issue date Mar 5, 2019
- KLA-Tencor Corporation
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for mixed mode wafer inspection
- Patent number 10,192,303
- Issue date Jan 29, 2019
- KLA-Tencor Corporation
- Jason Z. Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Image based specimen process control
- Patent number 10,181,185
- Issue date Jan 15, 2019
- KLA-Tencor Corp.
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Finding patterns in a design based on the patterns and their surrou...
- Patent number 10,062,012
- Issue date Aug 28, 2018
- KLA-Tencor Corp.
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System, method and computer program product for detecting defects i...
- Patent number 9,940,705
- Issue date Apr 10, 2018
- KLA-Tencor Corporation
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for universal target based inspection and metrology
- Patent number 9,576,861
- Issue date Feb 21, 2017
- KLA-Tencor Corporation
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern failure discovery by leveraging nominal characteristics of...
- Patent number 9,536,299
- Issue date Jan 3, 2017
- KLA-Tencor Corp.
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Metrology optimized inspection
- Patent number 9,518,932
- Issue date Dec 13, 2016
- KLA-Tencor Corp.
- Allen Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and systems for utilizing design data in combination with i...
- Patent number 9,401,014
- Issue date Jul 26, 2016
- KLA-Tencor Technologies Corp.
- Khurram Zafar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection guided overlay metrology
- Patent number 9,170,209
- Issue date Oct 27, 2015
- KLA-Tencor Corporation
- Ellis Chang
- G01 - MEASURING TESTING
Information Patent Grant
Determining design coordinates for wafer defects
- Patent number 9,087,367
- Issue date Jul 21, 2015
- KLA-Tencor Corp.
- Ellis Chang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Region based virtual fourier filter
- Patent number 8,989,479
- Issue date Mar 24, 2015
- KLA-Tencor Corporation
- Lisheng Gao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspecting a wafer and/or predicting one or more characteristics of...
- Patent number 8,948,495
- Issue date Feb 3, 2015
- KLA-Tencor Corp.
- Gino Marcuccilli
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and systems for utilizing design data in combination with i...
- Patent number 8,923,600
- Issue date Dec 30, 2014
- KLA-Tencor Technologies Corp.
- Khurram Zafar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Alteration for wafer inspection
- Patent number 8,826,200
- Issue date Sep 2, 2014
- KLA-Tencor Corp.
- Allen Park
- G01 - MEASURING TESTING
Information Patent Grant
Based device risk assessment
- Patent number 8,656,323
- Issue date Feb 18, 2014
- KLA-Tencor Corporation
- Allen Park
- G05 - CONTROLLING REGULATING
Information Patent Grant
Scanner performance comparison and matching using design and defect...
- Patent number 8,594,823
- Issue date Nov 26, 2013
- KLA-Tencor Corporation
- Allen Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection guided overlay metrology
- Patent number 8,559,001
- Issue date Oct 15, 2013
- KLA-Tencor Corporation
- Ellis Chang
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for using electrical information for a device b...
- Patent number 8,194,968
- Issue date Jun 5, 2012
- KLA-Tencor Corp.
- Allen Park
- G01 - MEASURING TESTING
Information Patent Grant
Computer-implemented methods for determining if actual defects are...
- Patent number 7,975,245
- Issue date Jul 5, 2011
- KLA-Tencor Corp.
- Glenn Florence
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND SYSTEM FOR MIXED MODE WAFER INSPECTION
- Publication number 20220230293
- Publication date Jul 21, 2022
- KLA Corporation
- Jason Z. Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Measurement of Overlay Error Using Device Inspection System
- Publication number 20210159128
- Publication date May 27, 2021
- KLA-Tencor Corporation
- Choon Hoong Hoo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Computer Assisted Weak Pattern Detection and Quantification System
- Publication number 20200372630
- Publication date Nov 26, 2020
- Naoshin Haque
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
USING STOCHASTIC FAILURE METRICS IN SEMICONDUCTOR MANUFACTURING
- Publication number 20200082523
- Publication date Mar 12, 2020
- KLA-Tencor Corporation
- Wing-Shan Ribi Leung
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
HYBRID DESIGN LAYOUT TO IDENTIFY OPTICAL PROXIMITY CORRECTION-RELAT...
- Publication number 20190392111
- Publication date Dec 26, 2019
- KLA-Tencor Corporation
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Measurement of Overlay Error Using Device Inspection System
- Publication number 20190252270
- Publication date Aug 15, 2019
- KLA-Tencor Corporation
- Choon Hoong Hoo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and System for Mixed Mode Wafer Inspection
- Publication number 20190108630
- Publication date Apr 11, 2019
- KLA-Tencor Corporation
- Jason Z. Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR SYSTEMATIC AND STOC...
- Publication number 20180300870
- Publication date Oct 18, 2018
- KLA-Tencor Corporation
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and System for Weak Pattern Quantification
- Publication number 20180174797
- Publication date Jun 21, 2018
- KLA-Tencor Corporation
- Andrew Cross
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR DETECTING DEFECTS I...
- Publication number 20170323434
- Publication date Nov 9, 2017
- KLA-Tencor Corporation
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Computer Assisted Weak Pattern Detection and Quantification System
- Publication number 20170309009
- Publication date Oct 26, 2017
- KLA-Tencor Corporation
- Naoshin Haque
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMAGE BASED SPECIMEN PROCESS CONTROL
- Publication number 20170200264
- Publication date Jul 13, 2017
- KLA-Tencor Corporation
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
USING THREE-DIMENSIONAL REPRESENTATIONS FOR DEFECT-RELATED APPLICAT...
- Publication number 20170161418
- Publication date Jun 8, 2017
- KLA-Tencor Corporation
- Allen Park
- G01 - MEASURING TESTING
Information Patent Application
Determining One or More Characteristics of a Pattern of Interest on...
- Publication number 20170059491
- Publication date Mar 2, 2017
- KLA-Tencor Corporation
- Brian Duffy
- G01 - MEASURING TESTING
Information Patent Application
Self Directed Metrology and Pattern Classification
- Publication number 20160372303
- Publication date Dec 22, 2016
- KLA-Tencor Corporation
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern Failure Discovery by Leveraging Nominal Characteristics of...
- Publication number 20150199803
- Publication date Jul 16, 2015
- KLA-Tencor Corporation
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Methods and Systems for Utilizing Design Data in Combination with I...
- Publication number 20150154746
- Publication date Jun 4, 2015
- KLA-Tencor Technologies Corporation
- Khurram Zafar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Metrology Optimized Inspection
- Publication number 20150124247
- Publication date May 7, 2015
- KLA-Tencor Corporation
- Allen Park
- G01 - MEASURING TESTING
Information Patent Application
Detecting IC Reliability Defects
- Publication number 20150120220
- Publication date Apr 30, 2015
- KLA-Tencor Corporation
- Joanne Wu
- G01 - MEASURING TESTING
Information Patent Application
Method and System for Universal Target Based Inspection and Metrology
- Publication number 20140199791
- Publication date Jul 17, 2014
- KLA-Tencor Corporation
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and System for Mixed Mode Wafer Inspection
- Publication number 20140153814
- Publication date Jun 5, 2014
- KLA-Tencor Corporation
- Jason Z. Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Inspecting a Wafer and/or Predicting One or More Characteristics of...
- Publication number 20140037187
- Publication date Feb 6, 2014
- Gino Marcuccilli
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Design Alteration for Wafer Inspection
- Publication number 20130318485
- Publication date Nov 28, 2013
- KLA-Tencor Corporation
- Allen Park
- G01 - MEASURING TESTING
Information Patent Application
Determining Design Coordinates for Wafer Defects
- Publication number 20130064442
- Publication date Mar 14, 2013
- KLA-Tencor Corporation
- Ellis Chang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Using Three-Dimensional Representations for Defect-Related Applicat...
- Publication number 20120316855
- Publication date Dec 13, 2012
- KLA-Tencor Corporation
- Allen Park
- G01 - MEASURING TESTING
Information Patent Application
DESIGN BASED DEVICE RISK ASSESSMENT
- Publication number 20120216169
- Publication date Aug 23, 2012
- KLA-Tencor Corporation
- Allen Park
- G05 - CONTROLLING REGULATING
Information Patent Application
REGION BASED VIRTUAL FOURIER FILTER
- Publication number 20120141013
- Publication date Jun 7, 2012
- KLA-Tencor Corporation
- Lisheng Gao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTION GUIDED OVERLAY METROLOGY
- Publication number 20110170091
- Publication date Jul 14, 2011
- KLA-Tencor Corporation
- Ellis Chang
- G01 - MEASURING TESTING
Information Patent Application
Scanner Performance Comparison And Matching Using Design And Defect...
- Publication number 20110172804
- Publication date Jul 14, 2011
- KLA-Tencor Corporation
- Allen Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND SYSTEMS FOR UTILIZING DESIGN DATA IN COMBINATION WITH I...
- Publication number 20090297019
- Publication date Dec 3, 2009
- KLA-Tencor Technologies Corporation
- Khurram Zafar
- G06 - COMPUTING CALCULATING COUNTING

Person

Patents Grantslast 30 patents

Measurement of overlay error using device inspection system

Method and system for mixed mode wafer inspection

Measurement of overlay error using device inspection system

Using stochastic failure metrics in semiconductor manufacturing

Hybrid design layout to identify optical proximity correction-relat...

Computer assisted weak pattern detection and quantification system

Self directed metrology and pattern classification

Determining one or more characteristics of a pattern of interest on...

System, method and computer program product for systematic and stoc...

Method and system for weak pattern quantification

Based device risk assessment

Method and system for mixed mode wafer inspection

Image based specimen process control

Finding patterns in a design based on the patterns and their surrou...

System, method and computer program product for detecting defects i...

Method and system for universal target based inspection and metrology

Pattern failure discovery by leveraging nominal characteristics of...

Metrology optimized inspection

Methods and systems for utilizing design data in combination with i...

Inspection guided overlay metrology

Determining design coordinates for wafer defects

Region based virtual fourier filter

Inspecting a wafer and/or predicting one or more characteristics of...

Methods and systems for utilizing design data in combination with i...

Alteration for wafer inspection

Based device risk assessment

Scanner performance comparison and matching using design and defect...

Inspection guided overlay metrology

Methods and systems for using electrical information for a device b...

Computer-implemented methods for determining if actual defects are...

Patents Applicationslast 30 patents

METHOD AND SYSTEM FOR MIXED MODE WAFER INSPECTION

Measurement of Overlay Error Using Device Inspection System

Computer Assisted Weak Pattern Detection and Quantification System

USING STOCHASTIC FAILURE METRICS IN SEMICONDUCTOR MANUFACTURING

HYBRID DESIGN LAYOUT TO IDENTIFY OPTICAL PROXIMITY CORRECTION-RELAT...

Measurement of Overlay Error Using Device Inspection System

Method and System for Mixed Mode Wafer Inspection

SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR SYSTEMATIC AND STOC...

Method and System for Weak Pattern Quantification

SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR DETECTING DEFECTS I...

Computer Assisted Weak Pattern Detection and Quantification System

IMAGE BASED SPECIMEN PROCESS CONTROL

USING THREE-DIMENSIONAL REPRESENTATIONS FOR DEFECT-RELATED APPLICAT...

Determining One or More Characteristics of a Pattern of Interest on...

Self Directed Metrology and Pattern Classification

Pattern Failure Discovery by Leveraging Nominal Characteristics of...

Methods and Systems for Utilizing Design Data in Combination with I...

Metrology Optimized Inspection

Detecting IC Reliability Defects

Method and System for Universal Target Based Inspection and Metrology

Method and System for Mixed Mode Wafer Inspection

Inspecting a Wafer and/or Predicting One or More Characteristics of...

Design Alteration for Wafer Inspection

Determining Design Coordinates for Wafer Defects

Using Three-Dimensional Representations for Defect-Related Applicat...

DESIGN BASED DEVICE RISK ASSESSMENT

REGION BASED VIRTUAL FOURIER FILTER

INSPECTION GUIDED OVERLAY METROLOGY

Scanner Performance Comparison And Matching Using Design And Defect...

METHODS AND SYSTEMS FOR UTILIZING DESIGN DATA IN COMBINATION WITH I...