Almut Czap

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Cleaning module, EUV lithography device and method for the cleaning...
- Patent number 9,046,794
- Issue date Jun 2, 2015
- Carl Zeiss SMT GmbH
- Stefan Hembacher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Actuator including magnet for a projection exposure system and proj...
- Patent number 9,025,128
- Issue date May 5, 2015
- Carl Zeiss SMT GmbH
- Armin Werber
- G02 - OPTICS
Information Patent Grant
EUV lithography device and method for processing an optical element
- Patent number 8,885,141
- Issue date Nov 11, 2014
- Carl Zeiss SMT GmbH
- Wolfgang Singer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Particle cleaning of optical elements for microlithography
- Patent number 8,477,285
- Issue date Jul 2, 2013
- Carl Zeiss SMT GmbH
- Dirk Heinrich Ehm
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR AVOIDING CONTAMINATION AND EUV-LITHOGRAPHY-SYSTEM
- Publication number 20120086925
- Publication date Apr 12, 2012
- Carl Zeiss SMT GMBH
- Dieter KRAUS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ACTUATOR INCLUDING MAGNET FOR A PROJECTION EXPOSURE SYSTEM AND PROJ...
- Publication number 20120008121
- Publication date Jan 12, 2012
- Carl Zeiss SMT GMBH
- Armin Werber
- G02 - OPTICS
Information Patent Application
EUV Lithography Device and Method For Processing An Optical Element
- Publication number 20110279799
- Publication date Nov 17, 2011
- Carl Zeiss SMT GMBH
- Wolfgang Singer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PARTICLE CLEANING OF OPTICAL ELEMENTS FOR MICROLITHOGRAPHY
- Publication number 20110188011
- Publication date Aug 4, 2011
- Carl Zeiss SMT GMBH
- Dirk Heinrich EHM
- B82 - NANO-TECHNOLOGY
Information Patent Application
CLEANING MODULE AND EUV LITHOGRAPHY DEVICE WITH CLEANING MODULE
- Publication number 20110058147
- Publication date Mar 10, 2011
- Carl Zeiss SMT AG
- Dirk Heinrich Ehm
- B08 - CLEANING
Information Patent Application
CLEANING MODULE, EUV LITHOGRAPHY DEVICE AND METHOD FOR THE CLEANING...
- Publication number 20110043774
- Publication date Feb 24, 2011
- Carl Zeiss SMT AG
- Stefan HEMBACHER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR REMOVING CONTAMINANTS FROM A SURFACE
- Publication number 20100071720
- Publication date Mar 25, 2010
- Carl Zeiss SMT AG
- Dirk Heinrich Ehm
- B08 - CLEANING

Person

Patents Grantslast 30 patents

Cleaning module, EUV lithography device and method for the cleaning...

Actuator including magnet for a projection exposure system and proj...

EUV lithography device and method for processing an optical element

Particle cleaning of optical elements for microlithography

Patents Applicationslast 30 patents

METHOD FOR AVOIDING CONTAMINATION AND EUV-LITHOGRAPHY-SYSTEM

ACTUATOR INCLUDING MAGNET FOR A PROJECTION EXPOSURE SYSTEM AND PROJ...

EUV Lithography Device and Method For Processing An Optical Element

PARTICLE CLEANING OF OPTICAL ELEMENTS FOR MICROLITHOGRAPHY

CLEANING MODULE AND EUV LITHOGRAPHY DEVICE WITH CLEANING MODULE

CLEANING MODULE, EUV LITHOGRAPHY DEVICE AND METHOD FOR THE CLEANING...

METHOD AND SYSTEM FOR REMOVING CONTAMINANTS FROM A SURFACE