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Alois Aigner
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Marktl, DE
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Patents Grants
last 30 patents
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Patent Grant
Method and apparatus for depositing a material layer originating fr...
Patent number
10,240,235
Issue date
Mar 26, 2019
Siltronic AG
Georg Brenninger
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for depositing a layer on a semiconductor wafer by means of...
Patent number
8,283,262
Issue date
Oct 9, 2012
Siltronic AG
Georg Brenninger
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and device for loading a susceptor
Patent number
6,435,797
Issue date
Aug 20, 2002
Wacker Siltronic Gesellschaft fur Halbleitermaterialien AG
Herbert Mittermaier
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Method and Apparatus For Depositing A Material Layer Originating Fr...
Publication number
20120263875
Publication date
Oct 18, 2012
Siltronic AG
Georg Brenninger
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR DEPOSITING A LAYER ON A SEMICONDUCTOR WAFER BY MEANS OF...
Publication number
20100015402
Publication date
Jan 21, 2010
Siltronic AG
Georg Brenninger
C30 - CRYSTAL GROWTH