Alois GOLLER

Person

VILLACH, AT

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for processing wafer-shaped articles
- Patent number 10,861,719
- Issue date Dec 8, 2020
- Lam Research AG
- David Mui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing wafer-shaped articles
- Patent number 10,720,343
- Issue date Jul 21, 2020
- Lam Research AG
- David Mui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing wafer-shaped articles
- Patent number 10,679,871
- Issue date Jun 9, 2020
- Lam Research AG
- David Mui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for liquid treatment of work pieces and flow control syst...
- Patent number 9,146,007
- Issue date Sep 29, 2015
- Lam Research AG
- Michael Schwaiger
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20240030050
- Publication date Jan 25, 2024
- LAM RESEARCH AG
- Alois GOLLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING A WAFER, AND METHOD OF CONTROLLING SUCH AN...
- Publication number 20220084848
- Publication date Mar 17, 2022
- LAM RESEARCH AG
- Daniel BRIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20200227284
- Publication date Jul 16, 2020
- LAM RESEARCH AG
- David MUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20170345681
- Publication date Nov 30, 2017
- LAM RESEARCH AG
- David MUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR LIQUID TREATMENT OF WORK PIECES AND FLOW CONTROL SYST...
- Publication number 20140144529
- Publication date May 29, 2014
- LAM RESEARCH AG
- Michael SCHWAIGER
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLES
- Publication number 20130284208
- Publication date Oct 31, 2013
- LAM RESEARCH AG
- Philipp ZAGORZ
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
APPARATUS AND METHOD FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLES
- Publication number 20130260569
- Publication date Oct 3, 2013
- LAM RESEARCH AG
- Michael GANSTER
- H01 - BASIC ELECTRIC ELEMENTS

Alois GOLLER

Person

Patents Grantslast 30 patents

Method and apparatus for processing wafer-shaped articles

Method and apparatus for processing wafer-shaped articles

Method and apparatus for processing wafer-shaped articles

Apparatus for liquid treatment of work pieces and flow control syst...

Patents Applicationslast 30 patents

APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES

APPARATUS FOR PROCESSING A WAFER, AND METHOD OF CONTROLLING SUCH AN...

METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES

METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES

APPARATUS FOR LIQUID TREATMENT OF WORK PIECES AND FLOW CONTROL SYST...

METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLES

APPARATUS AND METHOD FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLES