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Alois Goppinger
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Burghausen, DE
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Process for the deposition of polycrystalline silicon from the gas...
Patent number
4,160,797
Issue date
Jul 10, 1979
Wacker-Chemitronic Gesellschaft fur Elektronik-Grundstoffe mbH
Alois Goppinger
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER