Alok Ranjan

Person

Tomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Monolayer film mediated precision material etch
- Patent number 11,205,576
- Issue date Dec 21, 2021
- Tokyo Electron Limited
- Alok Ranjan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for cyclic etching of a patterned layer
- Patent number 10,971,373
- Issue date Apr 6, 2021
- Tokyo Electron Limited
- Alok Ranjan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for RF power distribution in a multi-zone electrode array
- Patent number 10,777,385
- Issue date Sep 15, 2020
- Tokyo Electron Limited
- Sergey Voronin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of selective silicon nitride etching
- Patent number 10,381,235
- Issue date Aug 13, 2019
- Tokyo Electron Limited
- Alok Ranjan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of sidewall image transfer
- Patent number 10,373,828
- Issue date Aug 6, 2019
- Tokyo Electron Limited
- Alok Ranjan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for cyclic etching of a patterned layer
- Patent number 10,366,902
- Issue date Jul 30, 2019
- Tokyo Electron Limited
- Alok Ranjan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monolayer film mediated precision film deposition
- Patent number 10,340,137
- Issue date Jul 2, 2019
- Tokyo Electron Limited
- Peter Ventzek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of quasi-atomic layer etching of silicon nitride
- Patent number 10,312,102
- Issue date Jun 4, 2019
- Tokyo Electron Limited
- Sonam D. Sherpa
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method of anisotropic extraction of silicon nitride mandrel for fab...
- Patent number 10,192,743
- Issue date Jan 29, 2019
- Tokyo Electron Limited
- Sonam D. Sherpa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defectivity metrology during DSA patterning
- Patent number 9,947,597
- Issue date Apr 17, 2018
- Tokyo Electron Limited
- Vinayak Rastogi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR CYCLIC ETCHING OF A PATTERNED LAYER
- Publication number 20190304798
- Publication date Oct 3, 2019
- TOKYO ELECTRON LIMITED
- Alok Ranjan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ANISOTROPIC EXTRACTION OF SILICON NITRIDE MANDREL FOR FAB...
- Publication number 20180122637
- Publication date May 3, 2018
- TOKYO ELECTRON LIMITED
- Sonam D. Sherpa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF QUASI-ATOMIC LAYER ETCHING OF SILICON NITRIDE
- Publication number 20180061653
- Publication date Mar 1, 2018
- TOKYO ELECTRON LIMITED
- Sonam D. Sherpa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MONOLAYER FILM MEDIATED PRECISION MATERIAL ETCH
- Publication number 20180025916
- Publication date Jan 25, 2018
- TOKYO ELECTRON LIMITED
- Alok Ranjan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONOLAYER FILM MEDIATED PRECISION FILM DEPOSITION
- Publication number 20180025908
- Publication date Jan 25, 2018
- TOKYO ELECTRON LIMITED
- Peter Ventzek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR RF POWER DISTRIBUTION IN A MULTI-ZONE ELECTRODE ARRAY
- Publication number 20180019102
- Publication date Jan 18, 2018
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR OPERATION INSTABILITY DETECTION IN A SURFACE WAVE PLASMA...
- Publication number 20180005805
- Publication date Jan 4, 2018
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF SIDEWALL IMAGE TRANSFER
- Publication number 20170345671
- Publication date Nov 30, 2017
- TOKYO ELECTRON LIMITED
- Alok Ranjan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF SELECTIVE SILICON OXIDE ETCHING
- Publication number 20170345673
- Publication date Nov 30, 2017
- TOKYO ELECTRON LIMITED
- Alok Ranjan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF SELECTIVE SILICON NITRIDE ETCHING
- Publication number 20170345674
- Publication date Nov 30, 2017
- TOKYO ELECTRON LIMITED
- Alok Ranjan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF SILICON EXTRACTION USING A HYDROGEN PLASMA
- Publication number 20170345667
- Publication date Nov 30, 2017
- TOKYO ELECTRON LIMITED
- Sonam D. Sherpa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Defectivity Metrology During DSA Patterning
- Publication number 20170287790
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Vinayak Rastogi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR CYCLIC ETCHING OF A PATTERNED LAYER
- Publication number 20170243757
- Publication date Aug 24, 2017
- TOKYO ELECTRON LIMITED
- Alok Ranjan
- H01 - BASIC ELECTRIC ELEMENTS

Alok Ranjan

Person

Patents Grantslast 30 patents

Monolayer film mediated precision material etch

Methods for cyclic etching of a patterned layer

Method for RF power distribution in a multi-zone electrode array

Method of selective silicon nitride etching

Method of sidewall image transfer

Methods for cyclic etching of a patterned layer

Monolayer film mediated precision film deposition

Method of quasi-atomic layer etching of silicon nitride

Method of anisotropic extraction of silicon nitride mandrel for fab...

Defectivity metrology during DSA patterning

Patents Applicationslast 30 patents

METHODS FOR CYCLIC ETCHING OF A PATTERNED LAYER

METHOD OF ANISOTROPIC EXTRACTION OF SILICON NITRIDE MANDREL FOR FAB...

METHOD OF QUASI-ATOMIC LAYER ETCHING OF SILICON NITRIDE

MONOLAYER FILM MEDIATED PRECISION MATERIAL ETCH

MONOLAYER FILM MEDIATED PRECISION FILM DEPOSITION

METHOD FOR RF POWER DISTRIBUTION IN A MULTI-ZONE ELECTRODE ARRAY

METHOD FOR OPERATION INSTABILITY DETECTION IN A SURFACE WAVE PLASMA...

METHOD OF SIDEWALL IMAGE TRANSFER

METHOD OF SELECTIVE SILICON OXIDE ETCHING

METHOD OF SELECTIVE SILICON NITRIDE ETCHING

METHOD OF SILICON EXTRACTION USING A HYDROGEN PLASMA

Defectivity Metrology During DSA Patterning

METHODS FOR CYCLIC ETCHING OF A PATTERNED LAYER