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Tigard, OR, US
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last 30 patents
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Patent Grant
Etching metal-oxide and protecting chamber components
Patent number
11,717,866
Issue date
Aug 8, 2023
Lam Research Corporation
Akhil N. Singhal
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
SHOWERHEAD THERMAL MANAGEMENT USING GAS COOLING
Publication number
20230131502
Publication date
Apr 27, 2023
LAM RESEARCH CORPORATION
Alon Ganany
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROTECTIVE COATING FOR A SEMICONDUCTOR REACTION CHAMBER
Publication number
20230038880
Publication date
Feb 9, 2023
LAM RESEARCH CORPORATION
Alon Ganany
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ETCHING METAL-OXIDE AND PROTECTING CHAMBER COMPONENTS
Publication number
20220258216
Publication date
Aug 18, 2022
LAM RESEARCH CORPORATION
Akhil N. Singhal
B08 - CLEANING
Information
Patent Application
ETCHING METAL-OXIDE AND PROTECTING CHAMBER COMPONENTS
Publication number
20210308726
Publication date
Oct 7, 2021
LAM RESEARCH CORPORATION
Akhil N. Singhal
B08 - CLEANING