Altti Torkkeli

Person

Tuusula, FI

People

Patents Grantslast 30 patents

Information Patent Grant
MEMS structure including a cap with a via
- Patent number 12,043,542
- Issue date Jul 23, 2024
- Murata Manufacturing Co., Ltd.
- Altti Torkkeli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Two-axis MEMS mirror with separated drives
- Patent number 11,526,000
- Issue date Dec 13, 2022
- Murata Manufacturing Co., Ltd.
- Matti Liukku
- G02 - OPTICS
Information Patent Grant
MEMS reflector with center support
- Patent number 10,969,575
- Issue date Apr 6, 2021
- Murata Manufacturing Co., Ltd.
- Altti Torkkeli
- G02 - OPTICS
Information Patent Grant
MEMS reflector system
- Patent number 10,914,939
- Issue date Feb 9, 2021
- Murata Manufacturing Co., Ltd.
- Altti Torkkeli
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Scanning mirror device and a method for manufacturing it
- Patent number 10,377,625
- Issue date Aug 13, 2019
- Murata Manufacturing Co., Ltd.
- Altti Torkkeli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Scanning MEMS reflector system
- Patent number 10,281,718
- Issue date May 7, 2019
- Murata Manufacturing Co., Ltd.
- Altti Torkkeli
- G02 - OPTICS
Information Patent Grant
Manufacturing method of a multi-level micromechanical structure on...
- Patent number 9,969,615
- Issue date May 15, 2018
- Murata Manufacturing Co., Ltd.
- Antti Iihola
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-level micromechanical structure
- Patent number 9,764,942
- Issue date Sep 19, 2017
- Murata Manufacturing Co., Ltd.
- Antti Iihola
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a MEMS structure and use of the method
- Patent number 9,556,021
- Issue date Jan 31, 2017
- Murata Manufacturing Co., Ltd.
- Altti Torkkeli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a MEMS structure
- Patent number 9,334,160
- Issue date May 10, 2016
- Murata Manufacturing Co., Ltd.
- Altti Torkkeli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibrating micromechanical sensor of angular velocity
- Patent number 8,646,333
- Issue date Feb 11, 2014
- Murata Electronics Oy
- Petri Klemetti
- G01 - MEASURING TESTING
Information Patent Grant
Vibrating micromechanical sensor of angular velocity
- Patent number 8,635,909
- Issue date Jan 28, 2014
- Murata Electronics Oy
- Petri Klemetti
- G01 - MEASURING TESTING
Information Patent Grant
Encapsulation module method for production and use thereof
- Patent number 8,279,615
- Issue date Oct 2, 2012
- Continental Teves AG & Co. oHG
- Bernhard Schmid
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibrating micromechanical sensor of angular velocity
- Patent number 8,104,343
- Issue date Jan 31, 2012
- VTI Technologies Oy
- Petri Klemetti
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE
- Publication number 20240343558
- Publication date Oct 17, 2024
- Murata Manufacturing Co., Ltd.
- Petteri KILPINEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DOUBLE LAYER MEMS DEVICES
- Publication number 20240286890
- Publication date Aug 29, 2024
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL ELEMENT AND A METHOD FOR MANUFACTURING IT
- Publication number 20230406698
- Publication date Dec 21, 2023
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACCELEROMETER ELEMENT FOR DETECTING OUT-OF-PLANE ACCELERATIONS
- Publication number 20230305036
- Publication date Sep 28, 2023
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR STRUCTURAL LAYER FABRICATION IN MICROMECHANICAL DEVICES
- Publication number 20230192480
- Publication date Jun 22, 2023
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR BONDING WAFERS, AND A WAFER
- Publication number 20220289567
- Publication date Sep 15, 2022
- Murata Manufacturing Co., Ltd.
- Konsta HANNULA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TWO-AXIS MEMS MIRROR WITH SEPARATED DRIVES
- Publication number 20200386985
- Publication date Dec 10, 2020
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- G01 - MEASURING TESTING
Information Patent Application
MEMS STRUCTURE INCLUDING A CAP WITH A VIA
- Publication number 20200283292
- Publication date Sep 10, 2020
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS REFLECTOR WITH CENTER SUPPORT
- Publication number 20190146211
- Publication date May 16, 2019
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- G02 - OPTICS
Information Patent Application
A MEMS REFLECTOR SYSTEM
- Publication number 20190064508
- Publication date Feb 28, 2019
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- G02 - OPTICS
Information Patent Application
SCANNING MEMS REFLECTOR SYSTEM
- Publication number 20180059406
- Publication date Mar 1, 2018
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- G02 - OPTICS
Information Patent Application
SCANNING MIRROR DEVICE AND A METHOD FOR MANUFACTURING IT
- Publication number 20170297898
- Publication date Oct 19, 2017
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-LEVEL MICROMECHANICAL STRUCTURE
- Publication number 20160332864
- Publication date Nov 17, 2016
- Murata Manufacturing Co., Ltd.
- Antti IIHOLA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF A MULTI-LEVEL MICROMECHANICAL STRUCTURE
- Publication number 20160332872
- Publication date Nov 17, 2016
- Murata Manufacturing Co., Ltd.
- Antti IIHOLA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING A MEMS STRUCTURE
- Publication number 20150336793
- Publication date Nov 26, 2015
- MURATA MANUFACTURING CO., LTD.
- Altti TORKKELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING A MEMS STRUCTURE AND USE OF THE METHOD
- Publication number 20150336794
- Publication date Nov 26, 2015
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIBRATING MICROMECHANICAL SENSOR OF ANGULAR VELOCITY
- Publication number 20120085167
- Publication date Apr 12, 2012
- VTI Technologies Oy
- Petri Klemetti
- G01 - MEASURING TESTING
Information Patent Application
VIBRATING MICROMECHANICAL SENSOR OF ANGULAR VELOCITY
- Publication number 20120085168
- Publication date Apr 12, 2012
- VTI Technologies Oy
- Petri Klemetti
- G01 - MEASURING TESTING
Information Patent Application
Encapsulation Module Method for Production and Use Thereof
- Publication number 20100290199
- Publication date Nov 18, 2010
- Continental Teves AG & Co. oHG
- Bernhard Schmid
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Vibrating micromechanical sensor of angular velocity
- Publication number 20090165553
- Publication date Jul 2, 2009
- VTI TECHNOLOGIES OY
- Petri Klemetti
- G01 - MEASURING TESTING

Altti Torkkeli

Person

Patents Grantslast 30 patents

MEMS structure including a cap with a via

Two-axis MEMS mirror with separated drives

MEMS reflector with center support

MEMS reflector system

Scanning mirror device and a method for manufacturing it

Scanning MEMS reflector system

Manufacturing method of a multi-level micromechanical structure on...

Multi-level micromechanical structure

Method of manufacturing a MEMS structure and use of the method

Method of manufacturing a MEMS structure

Vibrating micromechanical sensor of angular velocity

Vibrating micromechanical sensor of angular velocity

Encapsulation module method for production and use thereof

Vibrating micromechanical sensor of angular velocity

Patents Applicationslast 30 patents

DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE

DOUBLE LAYER MEMS DEVICES

MICROELECTROMECHANICAL ELEMENT AND A METHOD FOR MANUFACTURING IT

ACCELEROMETER ELEMENT FOR DETECTING OUT-OF-PLANE ACCELERATIONS

METHOD FOR STRUCTURAL LAYER FABRICATION IN MICROMECHANICAL DEVICES

METHOD FOR BONDING WAFERS, AND A WAFER

TWO-AXIS MEMS MIRROR WITH SEPARATED DRIVES

MEMS STRUCTURE INCLUDING A CAP WITH A VIA

MEMS REFLECTOR WITH CENTER SUPPORT

A MEMS REFLECTOR SYSTEM

SCANNING MEMS REFLECTOR SYSTEM

SCANNING MIRROR DEVICE AND A METHOD FOR MANUFACTURING IT

MULTI-LEVEL MICROMECHANICAL STRUCTURE

MANUFACTURING METHOD OF A MULTI-LEVEL MICROMECHANICAL STRUCTURE

METHOD OF MANUFACTURING A MEMS STRUCTURE

METHOD OF MANUFACTURING A MEMS STRUCTURE AND USE OF THE METHOD

VIBRATING MICROMECHANICAL SENSOR OF ANGULAR VELOCITY

VIBRATING MICROMECHANICAL SENSOR OF ANGULAR VELOCITY

Encapsulation Module Method for Production and Use Thereof

Vibrating micromechanical sensor of angular velocity