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Patents Grantslast 30 patents

Information Patent Grant
Self-assembling MEMS devices having thermal actuation
- Patent number 7,749,792
- Issue date Jul 6, 2010
- Carnegie Mellon University
- Gary K. Fedder
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Self-assembling mems devices having thermal actuation
- Publication number 20070103029
- Publication date May 10, 2007
- CARNEGIE MELLON UNIVERSITY
- Gary K. Fedder
- B81 - MICRO-STRUCTURAL TECHNOLOGY