ALVARO GARCIA DE GORORDO

Person

San Francisco, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Cryogenic atomic layer etch with noble gases
- Patent number 11,996,294
- Issue date May 28, 2024
- Applied Materials, Inc.
- Alvaro Garcia De Gorordo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Adjustable thermal break in a substrate support
- Patent number 11,764,041
- Issue date Sep 19, 2023
- Applied Materials, Inc.
- Alvaro Garcia De Gorordo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Condition selectable backside gas
- Patent number 11,666,952
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Stephen D. Prouty
- B08 - CLEANING
Information Patent Grant
Substrate support assembly with arc resistant coolant conduit
- Patent number 11,646,183
- Issue date May 9, 2023
- Applied Materials, Inc.
- Stephen Donald Prouty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cryogenic atomic layer etch with noble gases
- Patent number 11,515,166
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Alvaro Garcia De Gorordo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Cryogenic electrostatic chuck
- Patent number 11,437,261
- Issue date Sep 6, 2022
- Applied Materials, Inc.
- Yogananda Sarode Vishwanath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cryogenic atomic layer etch with noble gases
- Patent number 11,087,989
- Issue date Aug 10, 2021
- Applied Materials, Inc.
- Alvaro Garcia De Gorordo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for reducing etch nonuniformity in the presence of a weak m...
- Patent number 9,257,265
- Issue date Feb 9, 2016
- Applied Materials, Inc.
- Alvaro Garcia De Gorordo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CERAMIC COOLING BASE
- Publication number 20240408712
- Publication date Dec 12, 2024
- Applied Materials, Inc.
- Andreas Schmid
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CONDITION SELECTABLE BACKSIDE GAS
- Publication number 20230264238
- Publication date Aug 24, 2023
- Applied Materials, Inc.
- Stephen D. Prouty
- B08 - CLEANING
Information Patent Application
CRYOGENIC ATOMIC LAYER ETCH WITH NOBLE GASES
- Publication number 20230071505
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Alvaro GARCIA DE GORORDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRYOGENIC ATOMIC LAYER ETCH WITH NOBLE GASES
- Publication number 20210398815
- Publication date Dec 23, 2021
- Applied Materials, Inc.
- Alvaro GARCIA DE GORORDO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRICAL CONNECTOR FOR COOLED SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20210375599
- Publication date Dec 2, 2021
- Applied Materials, Inc.
- Andrew Antoine NOUJAIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLED SUBSTRATE SUPPORT ASSEMBLY FOR RADIO FREQUENCY ENVIRONMENTS
- Publication number 20210343512
- Publication date Nov 4, 2021
- Applied Materials, Inc.
- Vijay D. PARKHE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY WITH ARC RESISTANT COOLANT CONDUIT
- Publication number 20210296101
- Publication date Sep 23, 2021
- Applied Materials, Inc.
- Stephen Donald PROUTY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONDITION SELECTABLE BACKSIDE GAS
- Publication number 20210276056
- Publication date Sep 9, 2021
- Applied Materials, Inc.
- Stephen D. Prouty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADJUSTABLE THERMAL BREAK IN A SUBSTRATE SUPPORT
- Publication number 20200395197
- Publication date Dec 17, 2020
- Applied Materials, Inc.
- Alvaro GARCIA DE GORORDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRYOGENIC ELECTROSTATIC CHUCK
- Publication number 20200185248
- Publication date Jun 11, 2020
- Applied Materials, Inc.
- Yogananda SARODE VISHWANATH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MU METAL SHIELD COVER
- Publication number 20140262044
- Publication date Sep 18, 2014
- IMAD YOUSIF
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR REDUCING ETCH NONUNIFORMITY IN THE PRESENCE OF A WEAK M...
- Publication number 20140273304
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- ALVARO GARCIA DE GORORDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SKEW ELIMINATION AND CONTROL IN A PLASMA ENHANCED SUBSTRATE PROCESS...
- Publication number 20140209244
- Publication date Jul 31, 2014
- SAMER BANNA
- H01 - BASIC ELECTRIC ELEMENTS

ALVARO GARCIA DE GORORDO

Person

Patents Grantslast 30 patents

Cryogenic atomic layer etch with noble gases

Adjustable thermal break in a substrate support

Condition selectable backside gas

Substrate support assembly with arc resistant coolant conduit

Cryogenic atomic layer etch with noble gases

Cryogenic electrostatic chuck

Cryogenic atomic layer etch with noble gases

Methods for reducing etch nonuniformity in the presence of a weak m...

Patents Applicationslast 30 patents

CERAMIC COOLING BASE

CONDITION SELECTABLE BACKSIDE GAS

CRYOGENIC ATOMIC LAYER ETCH WITH NOBLE GASES

CRYOGENIC ATOMIC LAYER ETCH WITH NOBLE GASES

ELECTRICAL CONNECTOR FOR COOLED SUBSTRATE SUPPORT ASSEMBLY

COOLED SUBSTRATE SUPPORT ASSEMBLY FOR RADIO FREQUENCY ENVIRONMENTS

SUBSTRATE SUPPORT ASSEMBLY WITH ARC RESISTANT COOLANT CONDUIT

CONDITION SELECTABLE BACKSIDE GAS

ADJUSTABLE THERMAL BREAK IN A SUBSTRATE SUPPORT

CRYOGENIC ELECTROSTATIC CHUCK

MU METAL SHIELD COVER

METHODS FOR REDUCING ETCH NONUNIFORMITY IN THE PRESENCE OF A WEAK M...

SKEW ELIMINATION AND CONTROL IN A PLASMA ENHANCED SUBSTRATE PROCESS...