Ambarish Chhatre

Person

San Ramon, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Edge seal for lower electrode assembly
- Patent number 11,781,650
- Issue date Oct 10, 2023
- Lam Research Corporation
- David Schaefer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge ring dimensioned to extend lifetime of elastomer seal in a pla...
- Patent number 10,804,081
- Issue date Oct 13, 2020
- Lam Research Corporation
- Ambarish Chhatre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge seal for lower electrode assembly
- Patent number 9,869,392
- Issue date Jan 16, 2018
- Lam Research Corporation
- David Schaefer
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Edge seal for lower electrode assembly
- Patent number 9,859,142
- Issue date Jan 2, 2018
- Lam Research Corporation
- David Schaefer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for performing hot water seal on electrostatic chuck
- Patent number 9,054,148
- Issue date Jun 9, 2015
- Lam Research Corporation
- Hong Shih
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
- Publication number 20240077138
- Publication date Mar 7, 2024
- LAM RESEARCH CORPORATION
- David SCHAEFER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARRIER RING FOR FLOATING TCP CHAMBER GAS PLATE
- Publication number 20230402264
- Publication date Dec 14, 2023
- LAM RESEARCH CORPORATION
- Gordon PENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COLD EDGE LOW TEMPERATURE ELECTROSTATIC CHUCK
- Publication number 20230395359
- Publication date Dec 7, 2023
- LAM RESEARCH CORPORATION
- Ambarish Chhatre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN SHADOW RING FOR LOW-TILT TRENCH ETCHING
- Publication number 20230298929
- Publication date Sep 21, 2023
- LAM RESEARCH CORPORATION
- David SETTON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MID-CHAMBER FLOW OPTIMIZER
- Publication number 20230178342
- Publication date Jun 8, 2023
- LAM RESEARCH CORPORATION
- Craig Rosslee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Components and Processes for Managing Plasma Process Byproduct Mate...
- Publication number 20210225616
- Publication date Jul 22, 2021
- LAM RESEARCH CORPORATION
- Gordon Wen-Yin Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COIL AND WINDOW FOR PLASMA PROCESSING SYSTEM
- Publication number 20200234920
- Publication date Jul 23, 2020
- LAM RESEARCH CORPORATION
- Shen PENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
- Publication number 20180106371
- Publication date Apr 19, 2018
- LAM RESEARCH CORPORATION
- David Schaefer
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
SYSTEM AND METHOD FOR PERFORMING HOT WATER SEAL ON ELECTROSTATIC CHUCK
- Publication number 20150235889
- Publication date Aug 20, 2015
- LAM RESEARCH CORPORATION
- Hong Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RING DIMENSIONED TO EXTEND LIFETIME OF ELASTOMER SEAL IN A PLA...
- Publication number 20150179412
- Publication date Jun 25, 2015
- LAM RESEARCH CORPORATION
- Ambarish Chhatre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
- Publication number 20130340942
- Publication date Dec 26, 2013
- LAM RESEARCH CORPORATION
- David Schaefer
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
- Publication number 20130097840
- Publication date Apr 25, 2013
- LAM RESEARCH CORPORATION
- David Schaefer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR PERFORMING HOT WATER SEAL ON ELECTROSTATIC CHUCK
- Publication number 20130052339
- Publication date Feb 28, 2013
- Hong Shih
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Ambarish Chhatre

Person

Patents Grantslast 30 patents

Edge seal for lower electrode assembly

Edge ring dimensioned to extend lifetime of elastomer seal in a pla...

Edge seal for lower electrode assembly

Edge seal for lower electrode assembly

Method for performing hot water seal on electrostatic chuck

Patents Applicationslast 30 patents

EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY

CARRIER RING FOR FLOATING TCP CHAMBER GAS PLATE

COLD EDGE LOW TEMPERATURE ELECTROSTATIC CHUCK

THIN SHADOW RING FOR LOW-TILT TRENCH ETCHING

MID-CHAMBER FLOW OPTIMIZER

Components and Processes for Managing Plasma Process Byproduct Mate...

COIL AND WINDOW FOR PLASMA PROCESSING SYSTEM

EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY

SYSTEM AND METHOD FOR PERFORMING HOT WATER SEAL ON ELECTROSTATIC CHUCK

EDGE RING DIMENSIONED TO EXTEND LIFETIME OF ELASTOMER SEAL IN A PLA...

EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY

EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY

SYSTEM AND METHOD FOR PERFORMING HOT WATER SEAL ON ELECTROSTATIC CHUCK