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Ameeta Madhava
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Redwood Shores, CA, US
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last 30 patents
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Patent Grant
Detecting chemiluminescent radiation in the cleaning of a substrate...
Patent number
6,843,881
Issue date
Jan 18, 2005
Applied Materials, Inc.
Bok Hoen Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Method and apparatus for reducing particle contamination on wafer b...
Patent number
6,413,321
Issue date
Jul 2, 2002
Applied Materials, Inc.
Bok Hoen Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
Detecting chemiluminescent radiation in the cleaning of a substrate...
Publication number
20030185966
Publication date
Oct 2, 2003
APPLIED MATERIALS, INC.
Bok Hoen Kim
B08 - CLEANING