Amir Azordegan

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Generating high resolution images from low resolution images for se...
- Patent number 10,769,761
- Issue date Sep 8, 2020
- KLA-Tencor Corp.
- Saurabh Sharma
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Statistical overlay error prediction for feed forward and feedback...
- Patent number 10,545,412
- Issue date Jan 28, 2020
- KLA-Tencor Corporation
- Wei Chang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Particle beam inspector with independently-controllable beams
- Patent number 10,276,346
- Issue date Apr 30, 2019
- KLA-Tencor Corporation
- Brian Duffy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Using wafer geometry to improve scanner correction effectiveness fo...
- Patent number 9,513,565
- Issue date Dec 6, 2016
- KLA-Tencor Corporation
- Craig MacNaughton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Enhanced patterned wafer geometry measurements based design improve...
- Patent number 9,373,165
- Issue date Jun 21, 2016
- KLA-Tencor Corporation
- Amir Azordegan
- G01 - MEASURING TESTING
Information Patent Grant
Statistical overlay error prediction for feed forward and feedback...
- Patent number 9,087,176
- Issue date Jul 21, 2015
- KLA-Tencor Corporation
- Wei Chang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Using wafer geometry to improve scanner correction effectiveness fo...
- Patent number 9,029,810
- Issue date May 12, 2015
- KLA-Tencor Corporation
- Craig MacNaughton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Automated feature analysis with off-axis tilting
- Patent number 7,423,269
- Issue date Sep 9, 2008
- KLA-Tencor Technologies Corporation
- Amir Azordegan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for aberration-insensitive electron beam imaging
- Patent number 7,405,402
- Issue date Jul 29, 2008
- KLA-Tencor Technologies Corporation
- Srinivas Vedula
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for e-beam scanning
- Patent number 7,276,690
- Issue date Oct 2, 2007
- KLA-Tencor Technologies Corporation
- Gian Francesco Lorusso
- G01 - MEASURING TESTING
Information Patent Grant
Non-feature-dependent focusing
- Patent number 7,173,243
- Issue date Feb 6, 2007
- KLA-Tencor Technologies Corporation
- Hedong Yang
- G01 - MEASURING TESTING
Information Patent Grant
Methods of stabilizing measurement of ArF resist in CD-SEM
- Patent number 7,015,468
- Issue date Mar 21, 2006
- KLA-Tencor Technologies Corporation
- Amir Azordegan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron beam apparatus and methods of processing data fro...
- Patent number 6,995,369
- Issue date Feb 7, 2006
- KLA-Tencor Technologies Corporation
- Matthew Lent
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for e-beam scanning
- Patent number 6,815,675
- Issue date Nov 9, 2004
- KLA-Tencor Technologies Corporation
- Gian Francesco Lorusso
- G01 - MEASURING TESTING
Information Patent Grant
Motion picture output from electron microscope
- Patent number 6,770,879
- Issue date Aug 3, 2004
- KLA-Tencor Technologies Corporation
- Amir Azordegan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR MULTI-BEAM ELECTRON MICROSCOPY USING A DETECT...
- Publication number 20240194440
- Publication date Jun 13, 2024
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GENERATING HIGH RESOLUTION IMAGES FROM LOW RESOLUTION IMAGES FOR SE...
- Publication number 20190005629
- Publication date Jan 3, 2019
- KLA-Tencor Corporation
- Saurabh Sharma
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Statistical Overlay Error Prediction for Feed Forward and Feedback...
- Publication number 20170017162
- Publication date Jan 19, 2017
- KLA-Tenor Corporation
- Wei Chang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Enhanced Patterned Wafer Geometry Measurements Based Design Improve...
- Publication number 20160071260
- Publication date Mar 10, 2016
- KLA-Tencor Corporation
- Amir Azordegan
- G01 - MEASURING TESTING
Information Patent Application
Using Wafer Geometry to Improve Scanner Correction Effectiveness fo...
- Publication number 20150212429
- Publication date Jul 30, 2015
- KLA-Tencor Corporation
- Craig MacNaughton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Using Wafer Geometry to Improve Scanner Correction Effectiveness fo...
- Publication number 20140353527
- Publication date Dec 4, 2014
- KLA-Tencor Corporation
- Craig MacNaughton
- H01 - BASIC ELECTRIC ELEMENTS

Amir Azordegan

Person

Patents Grantslast 30 patents

Generating high resolution images from low resolution images for se...

Statistical overlay error prediction for feed forward and feedback...

Particle beam inspector with independently-controllable beams

Using wafer geometry to improve scanner correction effectiveness fo...

Enhanced patterned wafer geometry measurements based design improve...

Statistical overlay error prediction for feed forward and feedback...

Using wafer geometry to improve scanner correction effectiveness fo...

Automated feature analysis with off-axis tilting

Method and apparatus for aberration-insensitive electron beam imaging

Method and system for e-beam scanning

Non-feature-dependent focusing

Methods of stabilizing measurement of ArF resist in CD-SEM

Scanning electron beam apparatus and methods of processing data fro...

Method and system for e-beam scanning

Motion picture output from electron microscope

Patents Applicationslast 30 patents

SYSTEM AND METHOD FOR MULTI-BEAM ELECTRON MICROSCOPY USING A DETECT...

GENERATING HIGH RESOLUTION IMAGES FROM LOW RESOLUTION IMAGES FOR SE...

Statistical Overlay Error Prediction for Feed Forward and Feedback...

Enhanced Patterned Wafer Geometry Measurements Based Design Improve...

Using Wafer Geometry to Improve Scanner Correction Effectiveness fo...

Using Wafer Geometry to Improve Scanner Correction Effectiveness fo...