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Santa Clara, CA, US
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last 30 patents
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Patent Grant
Inspection system including parallel imaging paths with multiple an...
Patent number
10,429,319
Issue date
Oct 1, 2019
KLA-Tencor Corporation
Shiow-Hwei Hwang
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Inspection System Including Parallel Imaging Paths with Multiple an...
Publication number
20140285657
Publication date
Sep 25, 2014
KLA-Tencor Corporation
Shiow-Hwei Hwang
G01 - MEASURING TESTING