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Amir Widmann
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Sunnyvale, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Methods and systems for creating or performing a dynamic sampling s...
Patent number
10,649,447
Issue date
May 12, 2020
KLA-Tencor Corp.
Pavel Izikson
G05 - CONTROLLING REGULATING
Information
Patent Grant
Methods and systems for creating or performing a dynamic sampling s...
Patent number
9,651,943
Issue date
May 16, 2017
KLA-Tencor Corp.
Pavel Izikson
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method and system for universal target based inspection and metrology
Patent number
9,576,861
Issue date
Feb 21, 2017
KLA-Tencor Corporation
Allen Park
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Feedforward/feedback litho process control of stress and overlay
Patent number
9,116,442
Issue date
Aug 25, 2015
KLA-Tencor Corporation
Michael Adel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inspecting a wafer and/or predicting one or more characteristics of...
Patent number
8,948,495
Issue date
Feb 3, 2015
KLA-Tencor Corp.
Gino Marcuccilli
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Unique mark and method to determine critical dimension uniformity a...
Patent number
8,804,137
Issue date
Aug 12, 2014
KLA-Tencor Corporation
DongSub Choi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Advanced process control optimization
Patent number
8,655,469
Issue date
Feb 18, 2014
KLA-Tencor Corporation
DongSub Choi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and systems for creating or performing a dynamic sampling s...
Patent number
8,175,831
Issue date
May 8, 2012
KLA-Tencor Corp.
Pavel Izikson
G05 - CONTROLLING REGULATING
Information
Patent Grant
Feedforward/feedback litho process control of stress and overlay
Patent number
8,111,376
Issue date
Feb 7, 2012
KLA-Tencor Corporation
Michael Adel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Waferless recipe optimization
Patent number
8,045,786
Issue date
Oct 25, 2011
KLA-Tencor Technologies Corp.
Amir Widmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Computer-implemented methods, carrier media, and systems for creati...
Patent number
7,925,486
Issue date
Apr 12, 2011
KLA-Tencor Technologies Corp.
Mark Smith
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and system for optimizing alignment performance in a fleet o...
Patent number
7,679,069
Issue date
Mar 16, 2010
KLA-Tencor Technologies Corporation
Michael E. Adel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Techniques for determining overlay and critical dimension using a s...
Patent number
7,561,282
Issue date
Jul 14, 2009
KLA-Tencor Technologies Corporation
Amir Widmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Methods and Systems for Creating or Performing a Dynamic Sampling S...
Publication number
20170255188
Publication date
Sep 7, 2017
KLA-Tencor Corporation
Pavel Izikson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and System for Universal Target Based Inspection and Metrology
Publication number
20140199791
Publication date
Jul 17, 2014
KLA-Tencor Corporation
Allen Park
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Inspecting a Wafer and/or Predicting One or More Characteristics of...
Publication number
20140037187
Publication date
Feb 6, 2014
Gino Marcuccilli
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Methods and Systems for Creating or Performing a Dynamic Sampling S...
Publication number
20120208301
Publication date
Aug 16, 2012
KLA-Tencor Corporation
Pavel Izikson
G05 - CONTROLLING REGULATING
Information
Patent Application
FEEDFORWARD/FEEDBACK LITHO PROCESS CONTROL OF STRESS AND OVERLAY
Publication number
20120094400
Publication date
Apr 19, 2012
KLA-Tencor Corporation
Michael Adel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ADVANCED PROCESS CONTROL OPTIMIZATION
Publication number
20120022679
Publication date
Jan 26, 2012
KLA-Tencor Corporation
DongSub Choi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
UNIQUE MARK AND METHOD TO DETERMINE CRITICAL DIMENSION UNIFORMITY A...
Publication number
20110051150
Publication date
Mar 3, 2011
KLA-Tencor Corporation
DongSub Choi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FEEDFORWARD/FEEDBACK LITHO PROCESS CONTROL OF STRESS AND OVERLAY
Publication number
20080316442
Publication date
Dec 25, 2008
KLA-Tencor Corporation
Michael Adel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS AND SYSTEMS FOR CREATING OR PERFORMING A DYNAMIC SAMPLING S...
Publication number
20080286885
Publication date
Nov 20, 2008
Pavel Izikson
G05 - CONTROLLING REGULATING
Information
Patent Application
WAFERLESS RECIPE OPTIMIZATION
Publication number
20080094639
Publication date
Apr 24, 2008
KLA-Tencor Technologies Corporation
Amir Widmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND SYSTEM FOR OPTIMIZING ALIGNMENT PERFORMANCE IN A FLEET O...
Publication number
20080073589
Publication date
Mar 27, 2008
KLA-Tencor Technologies Corporation
Michael E. Adel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COMPUTER-IMPLEMENTED METHODS, CARRIER MEDIA, AND SYSTEMS FOR CREATI...
Publication number
20070276634
Publication date
Nov 29, 2007
Mark Smith
G06 - COMPUTING CALCULATING COUNTING