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Amit Ghosh
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Singapore, SG
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last 30 patents
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Patent Grant
Semiconductor mask alignment system utilizing pellicle with zero la...
Patent number
6,569,579
Issue date
May 27, 2003
Chartered Semiconductor Manufacturing, Ltd.
Amit Ghosh
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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last 30 patents
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Patent Application
Semiconductor mask alignment system
Publication number
20020132172
Publication date
Sep 19, 2002
Amit Ghosh
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC