Amit Khandewal

Follow

Person

Cupertino, CA, US

People

Patents Applicationslast 30 patents

Information Patent Application
AMMONIA-BASED PLASMA TREATMENT FOR METAL FILL IN NARROW FEATURES
- Publication number 20090117736
- Publication date May 7, 2009
- APPLIED MATERIALS, INC.
- Bencherki Mebarki
- H01 - BASIC ELECTRIC ELEMENTS