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Amit Shaked
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Karkur, IL
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Patents Grants
last 30 patents
Information
Patent Grant
Device-like metrology targets
Patent number
11,709,433
Issue date
Jul 25, 2023
KLA-Tencor Corporation
Vladimir Levinski
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Broadband illumination tuning
Patent number
11,662,562
Issue date
May 30, 2023
KLA Corporation
Andrew V. Hill
G02 - OPTICS
Information
Patent Grant
Device metrology targets and methods
Patent number
11,054,752
Issue date
Jul 6, 2021
KLA Corporation
Eran Amit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device metrology targets and methods
Patent number
10,571,811
Issue date
Feb 25, 2020
KLA-Tencor Corporation
Eran Amit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology targets with supplementary structures in an intermediate...
Patent number
10,551,749
Issue date
Feb 4, 2020
KLA-Tencor Corporation
Vladimir Levinski
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Estimating and eliminating inter-cell process variation inaccuracy
Patent number
10,415,963
Issue date
Sep 17, 2019
KLA-Tencor Corporation
Tal Marciano
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
DEVICE-LIKE METROLOGY TARGETS
Publication number
20220197152
Publication date
Jun 23, 2022
KLA-Tencor Corporation
Vladimir Levinski
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
BROADBAND ILLUMINATION TUNING
Publication number
20210247601
Publication date
Aug 12, 2021
KLA Corporation
Andrew V. Hill
G02 - OPTICS
Information
Patent Application
DEVICE-LIKE METROLOGY TARGETS
Publication number
20200124981
Publication date
Apr 23, 2020
KLA-Tencor Corporation
Vladimir Levinski
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEVICE METROLOGY TARGETS AND METHODS
Publication number
20190004438
Publication date
Jan 3, 2019
KLA-Tencor Corporation
Eran Amit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device-Like Metrology Targets
Publication number
20180188663
Publication date
Jul 5, 2018
KLA-Tencor Corporation
Vladimir Levinski
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEVICE METROLOGY TARGETS AND METHODS
Publication number
20160266505
Publication date
Sep 15, 2016
KLA-Tencor Corporation
Eran Amit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ESTIMATING AND ELIMINATING INTER-CELL PROCESS VARIATION INACCURACY
Publication number
20150292877
Publication date
Oct 15, 2015
KLA-Tencor Corporation
Tal Marciano
G01 - MEASURING TESTING