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Amy Wang
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Taipei, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Near non-adaptive virtual metrology and chamber control
Patent number
8,433,434
Issue date
Apr 30, 2013
Taiwan Semiconductor Manufacturing Company, Ltd.
Amy Wang
G05 - CONTROLLING REGULATING
Information
Patent Grant
Methodology to enable wafer result prediction of semiconductor wafe...
Patent number
8,145,337
Issue date
Mar 27, 2012
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Hsien Lin
G05 - CONTROLLING REGULATING
Information
Patent Grant
System and method for enhanced control of copper trench sheet resis...
Patent number
7,851,234
Issue date
Dec 14, 2010
Taiwan Semiconductor Manufacturing Co., Ltd.
Francis Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Auto routing for optimal uniformity control
Patent number
7,767,471
Issue date
Aug 3, 2010
Taiwan Semiconductor Manufacturing Company, Ltd.
Jean Wang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Near Non-Adaptive Virtual Metrology and Chamber Control
Publication number
20110009998
Publication date
Jan 13, 2011
Taiwan Semiconductor Manufacturing Company, Ltd.
Amy Wang
G05 - CONTROLLING REGULATING
Information
Patent Application
SYSTEM AND METHOD FOR ENHANCED CONTROL OF COPPER TRENCH SHEET RESIS...
Publication number
20090142860
Publication date
Jun 4, 2009
Taiwan Semiconductor Manufacturing Co., LTD
Francis Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Auto Routing for Optimal Uniformity Control
Publication number
20090035883
Publication date
Feb 5, 2009
Jean Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODOLOGY TO ENABLE WAFER RESULT PREDICTION OF BATCH TOOLS
Publication number
20080275676
Publication date
Nov 6, 2008
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Hsien Lin
G05 - CONTROLLING REGULATING